Optimal actuator shape design with input and state constraints for a wafer heating application

D.W.M. Veldman, R. H.B. Fey, H.J. Zwart, M.M.J. van de Wal, J.D.B.J. van den Boom, H. Nijmeijer

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

63 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Optimal actuator shape design with input and state constraints for a wafer heating application'. Together they form a unique fingerprint.

Chemistry

Material Science

Engineering