Optimised Frequency Range of Active Joints for Nanometre Range Stroke

S.M. Chakkalakkal Abdulla; Gijsbertus J.M. Krijnen

Optimised Frequency Range of Active Joints for Nanometre Range Stroke

S.M. Chakkalakkal Abdulla, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.

Original language	Undefined
Title of host publication	MicroMechanics Europe Workshop 2007
Place of Publication	Guimarães, Portugal
Publisher	University of Minho
Pages	211-214
Number of pages	4
ISBN (Print)	978-972-98603-3-1
Publication status	Published - 16 Sept 2007
Event	18th MicroMechanics Europe Workshop, MME 2007 - Guimaraes, Portugal Duration: 16 Sept 2007 → 18 Sept 2007 Conference number: 18

Publication series

Name
Publisher	University of Minho
Number	LNCS4549

Workshop

Workshop	18th MicroMechanics Europe Workshop, MME 2007
Abbreviated title	MME
Country/Territory	Portugal
City	Guimaraes
Period	16/09/07 → 18/09/07

Keywords

TST-ACTUATORS
EWI-11169
METIS-241961
IR-64386

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

Cite this

@inproceedings{d7b2335d14f742e1a8c32b313a8b8f69,

title = "Optimised Frequency Range of Active Joints for Nanometre Range Stroke",

abstract = "This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.",

keywords = "TST-ACTUATORS, EWI-11169, METIS-241961, IR-64386",

author = "{Chakkalakkal Abdulla}, S.M. and Krijnen, {Gijsbertus J.M.}",

year = "2007",

month = sep,

day = "16",

language = "Undefined",

isbn = "978-972-98603-3-1",

publisher = "University of Minho",

number = "LNCS4549",

pages = "211--214",

booktitle = "MicroMechanics Europe Workshop 2007",

address = "Portugal",

note = "18th MicroMechanics Europe Workshop, MME 2007 ; Conference date: 16-09-2007 Through 18-09-2007",

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TY - GEN

T1 - Optimised Frequency Range of Active Joints for Nanometre Range Stroke

AU - Chakkalakkal Abdulla, S.M.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 18

PY - 2007/9/16

Y1 - 2007/9/16

N2 - This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.

AB - This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.

KW - TST-ACTUATORS

KW - EWI-11169

KW - METIS-241961

KW - IR-64386

M3 - Conference contribution

SN - 978-972-98603-3-1

SP - 211

EP - 214

BT - MicroMechanics Europe Workshop 2007

PB - University of Minho

CY - Guimarães, Portugal

T2 - 18th MicroMechanics Europe Workshop, MME 2007

Y2 - 16 September 2007 through 18 September 2007

ER -