Optimised Frequency Range of Active Joints for Nanometre Range Stroke

S.M. Chakkalakkal Abdulla, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.
Original languageUndefined
Title of host publicationMicroMechanics Europe Workshop 2007
Place of PublicationGuimarães, Portugal
PublisherUniversity of Minho
Pages211-214
Number of pages4
ISBN (Print)978-972-98603-3-1
Publication statusPublished - 16 Sep 2007
Event18th MicroMechanics Europe Workshop, MME 2007 - Guimaraes, Portugal
Duration: 16 Sep 200718 Sep 2007
Conference number: 18

Publication series

Name
PublisherUniversity of Minho
NumberLNCS4549

Workshop

Workshop18th MicroMechanics Europe Workshop, MME 2007
Abbreviated titleMME
CountryPortugal
CityGuimaraes
Period16/09/0718/09/07

Keywords

  • TST-ACTUATORS
  • EWI-11169
  • METIS-241961
  • IR-64386

Cite this

Chakkalakkal Abdulla, S. M., & Krijnen, G. J. M. (2007). Optimised Frequency Range of Active Joints for Nanometre Range Stroke. In MicroMechanics Europe Workshop 2007 (pp. 211-214). Guimarães, Portugal: University of Minho.
Chakkalakkal Abdulla, S.M. ; Krijnen, Gijsbertus J.M. / Optimised Frequency Range of Active Joints for Nanometre Range Stroke. MicroMechanics Europe Workshop 2007. Guimarães, Portugal : University of Minho, 2007. pp. 211-214
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Chakkalakkal Abdulla, SM & Krijnen, GJM 2007, Optimised Frequency Range of Active Joints for Nanometre Range Stroke. in MicroMechanics Europe Workshop 2007. University of Minho, Guimarães, Portugal, pp. 211-214, 18th MicroMechanics Europe Workshop, MME 2007, Guimaraes, Portugal, 16/09/07.

Optimised Frequency Range of Active Joints for Nanometre Range Stroke. / Chakkalakkal Abdulla, S.M.; Krijnen, Gijsbertus J.M.

MicroMechanics Europe Workshop 2007. Guimarães, Portugal : University of Minho, 2007. p. 211-214.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Optimised Frequency Range of Active Joints for Nanometre Range Stroke

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N2 - This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.

AB - This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.

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KW - EWI-11169

KW - METIS-241961

KW - IR-64386

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Chakkalakkal Abdulla SM, Krijnen GJM. Optimised Frequency Range of Active Joints for Nanometre Range Stroke. In MicroMechanics Europe Workshop 2007. Guimarães, Portugal: University of Minho. 2007. p. 211-214