Optimised Frequency Range of Active Joints for Nanometre Range Stroke

S.M. Chakkalakkal Abdulla, Gijsbertus J.M. Krijnen

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    Abstract

    This paper describes the modelling of a micro bimorph cantilever which is composed of a Silicon Nitride cantilever beam coated on top with a thin Chromium layer. The structure functions as a vertical electrostatic actuator for nanometre displacements with stress induced upward curvature in the off-state. A detailed description of the optimisation of the frequency of the cantilever as a function of the thickness of the chromium layer and the deflection of the cantilever is presented. The developed model suggests that resonance frequencies of several MHz can be obtained for structures providing up to 300 nm stroke.
    Original languageUndefined
    Title of host publicationMicroMechanics Europe Workshop 2007
    Place of PublicationGuimarães, Portugal
    PublisherUniversity of Minho
    Pages211-214
    Number of pages4
    ISBN (Print)978-972-98603-3-1
    Publication statusPublished - 16 Sep 2007
    Event18th MicroMechanics Europe Workshop, MME 2007 - Guimaraes, Portugal
    Duration: 16 Sep 200718 Sep 2007
    Conference number: 18

    Publication series

    Name
    PublisherUniversity of Minho
    NumberLNCS4549

    Workshop

    Workshop18th MicroMechanics Europe Workshop, MME 2007
    Abbreviated titleMME
    CountryPortugal
    CityGuimaraes
    Period16/09/0718/09/07

    Keywords

    • TST-ACTUATORS
    • EWI-11169
    • METIS-241961
    • IR-64386

    Cite this

    Chakkalakkal Abdulla, S. M., & Krijnen, G. J. M. (2007). Optimised Frequency Range of Active Joints for Nanometre Range Stroke. In MicroMechanics Europe Workshop 2007 (pp. 211-214). Guimarães, Portugal: University of Minho.