Optimization of a capacitive MEMS power sensor for radio frequency applications

L.J. Fernandez, J. Sesé, Henricus V. Jansen, Remco J. Wiegerink, Jakob Flokstra

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Abstract

A novel, so called 'through', power sensor for radio frequency (rf) signals, based on capacitive measurements, was presented at MME 2003. We showed the design, fabrication and preliminary measurements. Here we describe further characterization and improvements on the design and fabrication with focus on increse of stability resolution and bandwidth of the sensor.
Original languageEnglish
Title of host publication15th MicroMechanics Europe Workshop, MME 2004
Place of PublicationLeuven
PublisherMicroMechanics Europe
Pages257-260
Number of pages4
ISBN (Print)9056825356
Publication statusPublished - 5 Sep 2004
Event15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium
Duration: 5 Sep 20047 Sep 2004
Conference number: 15

Publication series

Name
PublisherMicroMechanics Europe

Workshop

Workshop15th MicroMechanics Europe Workshop, MME 2004
Abbreviated titleMME
CountryBelgium
CityLeuven
Period5/09/047/09/04

Keywords

  • METIS-219922
  • EWI-19710
  • IR-76165

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