Optimization of a capacitive MEMS power sensor for radio frequency applications

L.J. Fernandez; J. Sesé; Henricus V. Jansen; Remco J. Wiegerink; Jakob Flokstra

Optimization of a capacitive MEMS power sensor for radio frequency applications

L.J. Fernandez, J. Sesé, Henricus V. Jansen, Remco J. Wiegerink, Jakob Flokstra

Faculty of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A novel, so called 'through', power sensor for radio frequency (rf) signals, based on capacitive measurements, was presented at MME 2003. We showed the design, fabrication and preliminary measurements. Here we describe further characterization and improvements on the design and fabrication with focus on increse of stability resolution and bandwidth of the sensor.

Original language	English
Title of host publication	15th MicroMechanics Europe Workshop, MME 2004
Place of Publication	Leuven
Publisher	MicroMechanics Europe
Pages	257-260
Number of pages	4
ISBN (Print)	9056825356
Publication status	Published - 5 Sept 2004
Event	15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium Duration: 5 Sept 2004 → 7 Sept 2004 Conference number: 15

Publication series

Name
Publisher	MicroMechanics Europe

Workshop

Workshop	15th MicroMechanics Europe Workshop, MME 2004
Abbreviated title	MME
Country/Territory	Belgium
City	Leuven
Period	5/09/04 → 7/09/04

Keywords

METIS-219922
EWI-19710
IR-76165

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title = "Optimization of a capacitive MEMS power sensor for radio frequency applications",

abstract = "A novel, so called 'through', power sensor for radio frequency (rf) signals, based on capacitive measurements, was presented at MME 2003. We showed the design, fabrication and preliminary measurements. Here we describe further characterization and improvements on the design and fabrication with focus on increse of stability resolution and bandwidth of the sensor.",

keywords = "METIS-219922, EWI-19710, IR-76165",

author = "L.J. Fernandez and J. Ses{\'e} and Jansen, {Henricus V.} and Wiegerink, {Remco J.} and Jakob Flokstra",

year = "2004",

month = sep,

day = "5",

language = "English",

isbn = "9056825356",

publisher = "MicroMechanics Europe",

pages = "257--260",

booktitle = "15th MicroMechanics Europe Workshop, MME 2004",

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T1 - Optimization of a capacitive MEMS power sensor for radio frequency applications

AU - Fernandez, L.J.

AU - Sesé, J.

AU - Jansen, Henricus V.

AU - Wiegerink, Remco J.

AU - Flokstra, Jakob

N1 - Conference code: 15

PY - 2004/9/5

Y1 - 2004/9/5

N2 - A novel, so called 'through', power sensor for radio frequency (rf) signals, based on capacitive measurements, was presented at MME 2003. We showed the design, fabrication and preliminary measurements. Here we describe further characterization and improvements on the design and fabrication with focus on increse of stability resolution and bandwidth of the sensor.

AB - A novel, so called 'through', power sensor for radio frequency (rf) signals, based on capacitive measurements, was presented at MME 2003. We showed the design, fabrication and preliminary measurements. Here we describe further characterization and improvements on the design and fabrication with focus on increse of stability resolution and bandwidth of the sensor.

KW - METIS-219922

KW - EWI-19710

KW - IR-76165

M3 - Conference contribution

SN - 9056825356

SP - 257

EP - 260

BT - 15th MicroMechanics Europe Workshop, MME 2004

PB - MicroMechanics Europe

CY - Leuven

T2 - 15th MicroMechanics Europe Workshop, MME 2004

Y2 - 5 September 2004 through 7 September 2004

ER -

Optimization of a capacitive MEMS power sensor for radio frequency applications

Abstract

Publication series

Workshop

Keywords

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