A novel, so called 'through', power sensor for radio frequency (rf) signals, based on capacitive measurements, was presented at MME 2003. We showed the design, fabrication and preliminary measurements. Here we describe further characterization and improvements on the design and fabrication with focus on increse of stability resolution and bandwidth of the sensor.
|Title of host publication||15th MicroMechanics Europe Workshop, MME 2004|
|Place of Publication||Leuven|
|Number of pages||4|
|Publication status||Published - 5 Sep 2004|
|Event||15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium|
Duration: 5 Sep 2004 → 7 Sep 2004
Conference number: 15
|Workshop||15th MicroMechanics Europe Workshop, MME 2004|
|Period||5/09/04 → 7/09/04|
Fernandez, L. J., Sesé, J., Jansen, H. V., Wiegerink, R. J., & Flokstra, J. (2004). Optimization of a capacitive MEMS power sensor for radio frequency applications. In 15th MicroMechanics Europe Workshop, MME 2004 (pp. 257-260). Leuven: MicroMechanics Europe.