Optimization of a capacitive MEMS power sensor for radio frequency

L.J. Fernandez, J. Sesé, Remco J. Wiegerink, Jakob Flokstra

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 5 Sep 2004
    Event15th MicroMechanics Europe Workshop, MME 2004 - Leuven, Belgium
    Duration: 5 Sep 20047 Sep 2004
    Conference number: 15

    Workshop

    Workshop15th MicroMechanics Europe Workshop, MME 2004
    Abbreviated titleMME
    CountryBelgium
    CityLeuven
    Period5/09/047/09/04

    Keywords

    • METIS-219920

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