High density arrays of artificial hair sensors, biomimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of Chromium electrodes close to the torsional beams, the upward deflection at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
|Publisher||STW Technology Foundation|
|Workshop||10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007|
|Period||29/11/07 → 30/11/07|
- TST-Life like