Optimization of biomimetic hair sensors

N. Izadi, R.K. Jaganatharaja, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    High density arrays of artificial hair sensors, biomimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of Chromium electrodes close to the torsional beams, the upward deflection at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
    Original languageUndefined
    Title of host publication10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors (SAFE)
    Place of PublicationUtrecht
    PublisherSTW
    Pages584-588
    Number of pages5
    ISBN (Print)978-90-73461-49-9
    Publication statusPublished - 29 Nov 2007
    Event10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007 - Veldhoven, Netherlands
    Duration: 29 Nov 200730 Nov 2007

    Publication series

    Name
    PublisherSTW Technology Foundation

    Workshop

    Workshop10th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2007
    CountryNetherlands
    CityVeldhoven
    Period29/11/0730/11/07

    Keywords

    • EWI-11465
    • IR-62029
    • METIS-247036
    • TST-Life like

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