Optimization of Comb-Drive Actuators [Nanopositioners for probe-based data storage and musical MEMS]

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    1529 Downloads (Pure)

    Fingerprint Dive into the research topics of 'Optimization of Comb-Drive Actuators [Nanopositioners for probe-based data storage and musical MEMS]'. Together they form a unique fingerprint.