Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing

N. Izadi; R.K. Jaganatharaja; J. Floris; Gijsbertus J.M. Krijnen

Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing

N. Izadi, R.K. Jaganatharaja, J. Floris, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.

Original language	Undefined
Title of host publication	Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS
Place of Publication	France
Publisher	EDA Publishing
Pages	112-115
Number of pages	4
ISBN (Print)	978-2-35500-000-3
Publication status	Published - 24 Apr 2007
Event	2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007 - Stresa, Italy Duration: 25 Apr 2007 → 27 Apr 2007 http://documents.irevues.inist.fr/handle/2042/14559

Publication series

Name
Publisher	EDA Publishing
Number	WP07-01

Conference

Conference	2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007
Abbreviated title	DTIP
Country/Territory	Italy
City	Stresa
Period	25/04/07 → 27/04/07
Internet address	http://documents.irevues.inist.fr/handle/2042/14559

Keywords

TST-Life like
TST-SENSORS
sensitivity optimization
EWI-9777
METIS-241616
IR-67094
Capacitive readout
Artificial hair
Flow sensor

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Cite this

Izadi, N., Jaganatharaja, R. K., Floris, J., & Krijnen, G. J. M. (2007). Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. In Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS (pp. 112-115). EDA Publishing. http://eda-publishing.imag.fr/spip/view_proc_article.php3?id_article=301

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title = "Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing",

abstract = "High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.",

keywords = "TST-Life like, TST-SENSORS, sensitivity optimization, EWI-9777, METIS-241616, IR-67094, Capacitive readout, Artificial hair, Flow sensor",

author = "N. Izadi and R.K. Jaganatharaja and J. Floris and Krijnen, {Gijsbertus J.M.}",

year = "2007",

month = apr,

day = "24",

language = "Undefined",

isbn = "978-2-35500-000-3",

publisher = "EDA Publishing",

number = "WP07-01",

pages = "112--115",

booktitle = "Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS",

note = "2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007 ; Conference date: 25-04-2007 Through 27-04-2007",

url = "http://documents.irevues.inist.fr/handle/2042/14559",

}

Izadi, N, Jaganatharaja, RK, Floris, J & Krijnen, GJM 2007, Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. in Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS. EDA Publishing, France, pp. 112-115, 2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007, Stresa, Italy, 25/04/07. <http://eda-publishing.imag.fr/spip/view_proc_article.php3?id_article=301>

Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing. / Izadi, N.; Jaganatharaja, R.K.; Floris, J. et al.
Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS. France: EDA Publishing, 2007. p. 112-115.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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AU - Jaganatharaja, R.K.

AU - Floris, J.

AU - Krijnen, Gijsbertus J.M.

PY - 2007/4/24

Y1 - 2007/4/24

N2 - High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.

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KW - IR-67094

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KW - Artificial hair

KW - Flow sensor

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BT - Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS

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