Optimization of Cricket-inspired, biomimetic artificial hair sensors for flow sensing

N. Izadi, R.K. Jaganatharaja, J. Floris, Gijsbertus J.M. Krijnen

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    Abstract

    High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
    Original languageUndefined
    Title of host publicationProceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS
    Place of PublicationFrance
    PublisherEDA Publishing
    Pages112-115
    Number of pages4
    ISBN (Print)978-2-35500-000-3
    Publication statusPublished - 24 Apr 2007
    Event2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007 - Stresa, Italy
    Duration: 25 Apr 200727 Apr 2007
    http://documents.irevues.inist.fr/handle/2042/14559

    Publication series

    Name
    PublisherEDA Publishing
    NumberWP07-01

    Conference

    Conference2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007
    Abbreviated titleDTIP
    Country/TerritoryItaly
    CityStresa
    Period25/04/0727/04/07
    Internet address

    Keywords

    • TST-Life like
    • TST-SENSORS
    • sensitivity optimization
    • EWI-9777
    • METIS-241616
    • IR-67094
    • Capacitive readout
    • Artificial hair
    • Flow sensor

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