Abstract
High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the ninth International Symposium on Design, Test, integration and packaging of MEMS / MOEMS |
| Place of Publication | France |
| Publisher | EDA Publishing |
| Pages | 112-115 |
| Number of pages | 4 |
| ISBN (Print) | 978-2-35500-000-3 |
| Publication status | Published - 24 Apr 2007 |
| Event | 2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007 - Stresa, Italy Duration: 25 Apr 2007 → 27 Apr 2007 http://documents.irevues.inist.fr/handle/2042/14559 |
Publication series
| Name | |
|---|---|
| Publisher | EDA Publishing |
| Number | WP07-01 |
Conference
| Conference | 2007 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2007 |
|---|---|
| Abbreviated title | DTIP |
| Country/Territory | Italy |
| City | Stresa |
| Period | 25/04/07 → 27/04/07 |
| Internet address |
Keywords
- TST-Life like
- TST-SENSORS
- sensitivity optimization
- EWI-9777
- METIS-241616
- IR-67094
- Capacitive readout
- Artificial hair
- Flow sensor