Optimization of LPCVD Silicon Oxynitride growth to large refractive index homogeneity and layer thickness uniformity

Kerstin Worhoff, Paul Lambeck, O.F.J. Noordman, O.F.J. Noordman, N.F. van Hulst, T.J.A. Popma

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

20 Citations (Scopus)
5 Downloads (Pure)

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