Optimization of nitridation conditions for high quality inter-polysilicon dielectric layers

J.H. Klootwijk, H.J. Bergveld, H. van Kranenburg, P.H. Woerlee, Hans Wallinga

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    20 Downloads (Pure)

    Fingerprint Dive into the research topics of 'Optimization of nitridation conditions for high quality inter-polysilicon dielectric layers'. Together they form a unique fingerprint.

    Physics & Astronomy