@inproceedings{eb80d6fa9b2443a68b1ea1420d53421e,
title = "Optimization of piezo-MEMS layout for a bladder monitor",
abstract = "MEMS technology has never been used for a non-imaging wearable ultrasound application, where e.g. lateral resolution is a minor issue. We combine finite element modeling and thin-plate analytic modeling and some measurements on MEMS devices, to optimize the performance of four MEMS layouts for a wearable bladder monitor. An array of square diaphragms, clamped on two sides, appears to be most favorable.",
keywords = "MEMS, Piezoelectric, SOI, Ultrasound, Wearable",
author = "Reinout Woltjer and Matthijs Suijlen and Pramodh Srinivasa and Nirupam Banerjee and Jan-Jaap Koning and Guus Rijnders",
note = "Publisher Copyright: {\textcopyright} 2016 IEEE.; IEEE International Ultrasonics Symposium, IUS 2016, IUS ; Conference date: 18-09-2016 Through 21-09-2016",
year = "2016",
month = nov,
day = "1",
doi = "10.1109/ULTSYM.2016.7728563",
language = "English",
isbn = "978-1-4673-9897-8",
series = "IEEE International Ultrasonics Symposium (IUS)",
publisher = "IEEE",
booktitle = "2016 IEEE International Ultrasonics Symposium, IUS 2016",
address = "United States",
}