Optimized comb-drive finger shape for shock-resistant actuation

    Research output: Contribution to journalArticleAcademicpeer-review

    10 Citations (Scopus)
    28 Downloads (Pure)

    Abstract

    This work presents the analytical solution, finite-element analysis, realization and measurement of comb drives with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. The optimized finger shape provides much more available force than the standard straight finger shape, especially at large displacements. A graphical method is presented to determine whether stable voltage control is possible for a given available force curve. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The new finger shape is asymmetric, and the unit-cell width is equal to the unit-cell width of standard straight fingers that are commonly used, and can be used in all applications where a large force is required. Because the unit-cell width is not increased, straight fingers can be replaced by the new finger shape without changing the rest of the design. It is especially suited for shock-resistant positioning and for applications where a constant force is desired.
    Original languageEnglish
    Article number105003
    Number of pages9
    JournalJournal of micromechanics and microengineering
    Volume20
    Issue number10
    DOIs
    Publication statusPublished - 1 Sep 2010

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    Voltage control
    Finite element method

    Keywords

    • shock-resistant actuation
    • EWI-18539
    • METIS-271054
    • Electrostatic comb drive
    • MEMS actuators
    • optimized comb finger shape

    Cite this

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    title = "Optimized comb-drive finger shape for shock-resistant actuation",
    abstract = "This work presents the analytical solution, finite-element analysis, realization and measurement of comb drives with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. The optimized finger shape provides much more available force than the standard straight finger shape, especially at large displacements. A graphical method is presented to determine whether stable voltage control is possible for a given available force curve. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The new finger shape is asymmetric, and the unit-cell width is equal to the unit-cell width of standard straight fingers that are commonly used, and can be used in all applications where a large force is required. Because the unit-cell width is not increased, straight fingers can be replaced by the new finger shape without changing the rest of the design. It is especially suited for shock-resistant positioning and for applications where a constant force is desired.",
    keywords = "shock-resistant actuation, EWI-18539, METIS-271054, Electrostatic comb drive, MEMS actuators, optimized comb finger shape",
    author = "Engelen, {Johannes Bernardus Charles} and Leon Abelmann and Elwenspoek, {Michael Curt}",
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    language = "English",
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    journal = "Journal of micromechanics and microengineering",
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    Optimized comb-drive finger shape for shock-resistant actuation. / Engelen, Johannes Bernardus Charles; Abelmann, Leon; Elwenspoek, Michael Curt.

    In: Journal of micromechanics and microengineering, Vol. 20, No. 10, 105003, 01.09.2010.

    Research output: Contribution to journalArticleAcademicpeer-review

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    T1 - Optimized comb-drive finger shape for shock-resistant actuation

    AU - Engelen, Johannes Bernardus Charles

    AU - Abelmann, Leon

    AU - Elwenspoek, Michael Curt

    PY - 2010/9/1

    Y1 - 2010/9/1

    N2 - This work presents the analytical solution, finite-element analysis, realization and measurement of comb drives with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. The optimized finger shape provides much more available force than the standard straight finger shape, especially at large displacements. A graphical method is presented to determine whether stable voltage control is possible for a given available force curve. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The new finger shape is asymmetric, and the unit-cell width is equal to the unit-cell width of standard straight fingers that are commonly used, and can be used in all applications where a large force is required. Because the unit-cell width is not increased, straight fingers can be replaced by the new finger shape without changing the rest of the design. It is especially suited for shock-resistant positioning and for applications where a constant force is desired.

    AB - This work presents the analytical solution, finite-element analysis, realization and measurement of comb drives with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. The optimized finger shape provides much more available force than the standard straight finger shape, especially at large displacements. A graphical method is presented to determine whether stable voltage control is possible for a given available force curve. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The new finger shape is asymmetric, and the unit-cell width is equal to the unit-cell width of standard straight fingers that are commonly used, and can be used in all applications where a large force is required. Because the unit-cell width is not increased, straight fingers can be replaced by the new finger shape without changing the rest of the design. It is especially suited for shock-resistant positioning and for applications where a constant force is desired.

    KW - shock-resistant actuation

    KW - EWI-18539

    KW - METIS-271054

    KW - Electrostatic comb drive

    KW - MEMS actuators

    KW - optimized comb finger shape

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    DO - 10.1088/0960-1317/20/10/105003

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    JO - Journal of micromechanics and microengineering

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