Optimized comb drive finger shape for shock-resistant actuation

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    Abstract

    This work presents the analytical solution, realization and measurement of a comb drive with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The finger shape is asymmetric, resulting in a 20% smaller unit cell width compared to a symmetric shape. This finger shape provides 4 times more available force than the standard straight finger shape.
    Original languageUndefined
    Title of host publication23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
    PublisherIEEE
    Pages1147-1150
    Number of pages4
    ISBN (Print)978-1-4244-5763-2
    DOIs
    Publication statusPublished - 24 Jan 2010
    Event23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Wanchai, Hong Kong, Hong Kong
    Duration: 24 Jan 201028 Jan 2010
    Conference number: 23

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
    Abbreviated titleMEMS
    CountryHong Kong
    CityHong Kong
    Period24/01/1028/01/10

    Keywords

    • METIS-271053
    • MEMS actuators
    • IR-73516
    • EWI-18538
    • optimized comb drive finger shape
    • Electrostatic comb drive
    • TST-ACTUATORS
    • shock-resistant actuation

    Cite this

    Engelen, J. B. C., Abelmann, L., & Elwenspoek, M. C. (2010). Optimized comb drive finger shape for shock-resistant actuation. In 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 (pp. 1147-1150). IEEE. https://doi.org/10.1109/MEMSYS.2010.5442414