Optimized comb drive finger shape for shock-resistant actuation

Johannes Bernardus Charles Engelen; Leon Abelmann; Michael Curt Elwenspoek

doi:10.1109/MEMSYS.2010.5442414

Optimized comb drive finger shape for shock-resistant actuation

Johannes Bernardus Charles Engelen
, Leon Abelmann
, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

2 Citations (Scopus)

524 Downloads (Pure)

Abstract

This work presents the analytical solution, realization and measurement of a comb drive with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The finger shape is asymmetric, resulting in a 20% smaller unit cell width compared to a symmetric shape. This finger shape provides 4 times more available force than the standard straight finger shape.

Original language	Undefined
Title of host publication	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Publisher	IEEE
Pages	1147-1150
Number of pages	4
ISBN (Print)	978-1-4244-5763-2
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442414
Publication status	Published - 24 Jan 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Wanchai, Hong Kong, Hong Kong Duration: 24 Jan 2010 → 28 Jan 2010 Conference number: 23

Publication series

Name
Publisher	IEEE

Conference

Conference	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Abbreviated title	MEMS
Country/Territory	Hong Kong
City	Hong Kong
Period	24/01/10 → 28/01/10

Keywords

METIS-271053
MEMS actuators
IR-73516
EWI-18538
optimized comb drive finger shape
Electrostatic comb drive
TST-ACTUATORS
shock-resistant actuation

Access to Document

10.1109/MEMSYS.2010.5442414

Cite this

@inproceedings{d935b668300f4ad0beb3c5b1d0e8ab0a,

title = "Optimized comb drive finger shape for shock-resistant actuation",

abstract = "This work presents the analytical solution, realization and measurement of a comb drive with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The finger shape is asymmetric, resulting in a 20\% smaller unit cell width compared to a symmetric shape. This finger shape provides 4 times more available force than the standard straight finger shape.",

keywords = "METIS-271053, MEMS actuators, IR-73516, EWI-18538, optimized comb drive finger shape, Electrostatic comb drive, TST-ACTUATORS, shock-resistant actuation",

author = "Engelen, \{Johannes Bernardus Charles\} and Leon Abelmann and Elwenspoek, \{Michael Curt\}",

note = "10.1109/MEMSYS.2010.5442414 ; 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

year = "2010",

month = jan,

day = "24",

doi = "10.1109/MEMSYS.2010.5442414",

language = "Undefined",

isbn = "978-1-4244-5763-2",

publisher = "IEEE",

pages = "1147--1150",

booktitle = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010",

address = "United States",

}

Engelen, JBC, Abelmann, L & Elwenspoek, MC 2010, Optimized comb drive finger shape for shock-resistant actuation. in 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010. IEEE, pp. 1147-1150, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, Hong Kong, 24/01/10. https://doi.org/10.1109/MEMSYS.2010.5442414

Optimized comb drive finger shape for shock-resistant actuation. / Engelen, Johannes Bernardus Charles; Abelmann, Leon; Elwenspoek, Michael Curt.
23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010. IEEE, 2010. p. 1147-1150.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Optimized comb drive finger shape for shock-resistant actuation

AU - Engelen, Johannes Bernardus Charles

AU - Abelmann, Leon

AU - Elwenspoek, Michael Curt

N1 - Conference code: 23

PY - 2010/1/24

Y1 - 2010/1/24

N2 - This work presents the analytical solution, realization and measurement of a comb drive with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The finger shape is asymmetric, resulting in a 20% smaller unit cell width compared to a symmetric shape. This finger shape provides 4 times more available force than the standard straight finger shape.

AB - This work presents the analytical solution, realization and measurement of a comb drive with finger shapes optimized for shock-resistant actuation. The available force for actuating an external load determines how large shock forces can be compensated for. An analytical expression is presented for the finger shape that provides a constant large available force over the actuation range. The finger shape is asymmetric, resulting in a 20% smaller unit cell width compared to a symmetric shape. This finger shape provides 4 times more available force than the standard straight finger shape.

KW - METIS-271053

KW - MEMS actuators

KW - IR-73516

KW - EWI-18538

KW - optimized comb drive finger shape

KW - Electrostatic comb drive

KW - TST-ACTUATORS

KW - shock-resistant actuation

U2 - 10.1109/MEMSYS.2010.5442414

DO - 10.1109/MEMSYS.2010.5442414

M3 - Conference contribution

SN - 978-1-4244-5763-2

SP - 1147

EP - 1150

BT - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

PB - IEEE

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -