@inproceedings{34e20697c6544e44bd7b5f5679e7d112,
title = "Optimized deposition and structuring of reactively co-sputtered Al2O3:Er waveguide layers with net optical gain",
abstract = "Growth of reactively co-sputtered $Al_2O_3$ layers and micro-structuring using reactive ion etching have been optimized, resulting in channel waveguides in the as-deposited layers with optical propagation losses as low as 0.21 dB/cm. For active functionality, Erdoped $Al_2O_3$ layers have also been deposited by co-sputtering from a metallic Er target. At relevant dopant levels ($~10^{20}$ $cm^{-3})$ lifetimes of the $^{4}I_{13/2}$ level up to 7 ms have been measured and net optical gain of 0.7 dB/cm has been obtained in a 700-nm thick Erdoped $Al_2O_3$ waveguide. Investigation of active devices, such as lasers and amplifiers, exploiting the developed technology is on-going.",
keywords = "IOMS-APD: Active Photonic Devices, EWI-11857, METIS-245993, EC Grant Agreement nr.: FP6/017501, IR-64608",
author = "J. Bradley and D. Geskus and T. Blaauwendraat and F. Ay and Kerstin Worhoff and Markus Pollnau",
year = "2007",
month = dec,
day = "17",
language = "Undefined",
isbn = "978-2-9600753-0-4",
publisher = "IEEE",
number = "7",
pages = "107--110",
editor = "Ph. Emplit and M. Delqu{\'e} and S.-P. Gorza and P. Knockaert and X Leijtens",
booktitle = "12th Annual Symposium IEEE/LEOS Benelux",
address = "United States",
note = "12th Annual Symposium IEEE/LEOS Benelux Chapter 2007 ; Conference date: 17-12-2007 Through 18-12-2007",
}