Optimized electrode coverage of membrane actuators based on epitaxial PZT thin films

Duc Minh Nguyen, H. Nazeer, Jan M. Dekkers, David H.A. Blank, Augustinus J.H.M. Rijnders

Research output: Contribution to journalArticleAcademicpeer-review

20 Citations (Scopus)
116 Downloads (Pure)

Abstract

This research presents an optimization of piezoelectric membrane actuators by maximizing the actuator displacement. Membrane actuators based on epitaxial Pb(Zr,Ti)O3 thin films grown on all-oxide electrodes and buffer layers using silicon technology were fabricated. Electrode coverage was found to be an important factor in the actuation displacement of the piezoelectric membranes. The optimum electrode coverage for maximum displacement was theoretically determined to be 39%, which is in good agreement with the experimental results. Dependences of membrane displacement and optimum electrode coverage on membrane diameter and PZT-film/Si-device-layer thickness ratio have also been investigated.
Original languageEnglish
Article number085013
Pages (from-to)-
Number of pages9
JournalSmart materials & structures
Volume22
Issue number8
DOIs
Publication statusPublished - 2013

Keywords

  • METIS-297085
  • IR-86950

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