Organometallic Polymers as Etch Barriers in Nano and Microlithographic Applications

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 1 Oct 2003
Event	Kick-Off Symposium NanoImpuls - Enschede Duration: 1 Oct 2003 → …

Conference	Kick-Off Symposium NanoImpuls
City	Enschede
Period	1/10/03 → …

Keywords

@conference{056ca700b27544ea975500ed52fb4b92,

title = "Organometallic Polymers as Etch Barriers in Nano and Microlithographic Applications",

keywords = "METIS-213186",

author = "Hempenius, {Mark A.} and I. Korczagin and Lammertink, {Rob G.H.} and M. P{\'e}ter and Vancso, {Gyula J.}",

year = "2003",

month = oct,

day = "1",

language = "Undefined",

pages = "--",

note = "Kick-Off Symposium NanoImpuls ; Conference date: 01-10-2003",

}