Orientation-dependent crystal growth and etch rate functions

J. van Suchtelen, E. van Veenendaal, A.J. Nijdam, W.J.P. van Enckevort, Michael Curt Elwenspoek

Research output: Other contribution › Other research output

Keywords

@misc{94140e26ac0142efbd28d7ea2cd38e17,

title = "Orientation-dependent crystal growth and etch rate functions",

keywords = "METIS-114654",

author = "{van Suchtelen}, J. and {van Veenendaal}, E. and A.J. Nijdam and {van Enckevort}, W.J.P. and Elwenspoek, {Michael Curt}",

year = "1999",

month = mar,

day = "15",

language = "Undefined",

type = "Other",

}