Oxide breakdown

J.F. Verweij, J.H. Klootwijk

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the Sixth ESPRIT Workshop on Characterisation and Growth of Thin Dielectrics in Microelectronics
    Place of PublicationKinsale, Co. Cork
    Pages2-35
    Publication statusPublished - 22 Nov 1994

    Keywords

    • METIS-113991

    Cite this

    Verweij, J. F., & Klootwijk, J. H. (1994). Oxide breakdown. In Proceedings of the Sixth ESPRIT Workshop on Characterisation and Growth of Thin Dielectrics in Microelectronics (pp. 2-35). Kinsale, Co. Cork.