Oxide breakdown

J.F. Verweij, J.H. Klootwijk

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the Sixth ESPRIT Workshop on Characterisation and Growth of Thin Dielectrics in Microelectronics
Place of Publication	Kinsale, Co. Cork
Pages	2-35
Publication status	Published - 22 Nov 1994

Keywords

@inproceedings{8f536c8c36e046ce8df8fd59a6fb7e6f,

title = "Oxide breakdown",

keywords = "METIS-113991",

author = "J.F. Verweij and J.H. Klootwijk",

year = "1994",

month = nov,

day = "22",

language = "Undefined",

pages = "2--35",

booktitle = "Proceedings of the Sixth ESPRIT Workshop on Characterisation and Growth of Thin Dielectrics in Microelectronics",

}