Oxide growth on silicon: interface formation and nanoscale electrical properties

Research output: ThesisPhD Thesis - Research UT, graduation UT

Original languageUndefined
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Poelsema, B., Supervisor
Award date13 Jul 2006
Place of PublicationEnschede, the Netherlands
Publisher
Print ISBNs90-365-2374-5
Publication statusPublished - 13 Jul 2006

Keywords

  • METIS-232789

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