Oxide growth on silicon: interface formation and nanoscale electrical properties

Research output: Thesis › PhD Thesis - Research UT, graduation UT

Cite this

@phdthesis{88fa6cd252e34e0b927d9bd9df293da9,

title = "Oxide growth on silicon: interface formation and nanoscale electrical properties",

author = "Sturm, {Jacobus Marinus}",

year = "2006",

month = jul,

day = "13",

language = "English",

isbn = "90-365-2374-5",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}