Oxide superlattices by PLD: A practical guide

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In this chapter, a brief overview of examples is given of the use of pulsed laser deposition (PLD) for the fabrication of complex oxide superlattices. Attention is paid to practical issues, such as the choice of substrates and subsequent surface treatments, the observation of the type of growth that occurs, and growth rate calibration, both using in situ monitoring by RHEED as well as ex situ characterization by atomic force microscopy (AFM), X-ray diffraction (XRD), and scanning transmission electron microscopy (STEM).
Original languageEnglish
Title of host publicationMetal Oxide-Based Thin Film Structures
Subtitle of host publicationFormation, Characterization and Application of Interface-Based Phenomena
Number of pages26
ISBN (Electronic)9780081017524
ISBN (Print)9780128111666
Publication statusPublished - 21 Sept 2017

Publication series

NameMetal Oxide Series


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