In this chapter, a brief overview of examples is given of the use of pulsed laser deposition (PLD) for the fabrication of complex oxide superlattices. Attention is paid to practical issues, such as the choice of substrates and subsequent surface treatments, the observation of the type of growth that occurs, and growth rate calibration, both using in situ monitoring by RHEED as well as ex situ characterization by atomic force microscopy (AFM), X-ray diffraction (XRD), and scanning transmission electron microscopy (STEM).
|Title of host publication||Metal Oxide-Based Thin Film Structures |
|Subtitle of host publication||Formation, Characterization and Application of Interface-Based Phenomena|
|Number of pages||26|
|ISBN (Electronic)||9780081017524 |
|ISBN (Print)||9780128111666 |
|Publication status||Published - 21 Sep 2017|