Oxide superlattices by PLD:  A practical guide

G. Koster; M. Huijben; A.J.H.M. Rijnders

doi:10.1016/B978-0-12-811166-6.00002-9

Oxide superlattices by PLD: A practical guide

G. Koster, M. Huijben, A.J.H.M. Rijnders

Inorganic Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Academic › peer-review

Abstract

In this chapter, a brief overview of examples is given of the use of pulsed laser deposition (PLD) for the fabrication of complex oxide superlattices. Attention is paid to practical issues, such as the choice of substrates and subsequent surface treatments, the observation of the type of growth that occurs, and growth rate calibration, both using in situ monitoring by RHEED as well as ex situ characterization by atomic force microscopy (AFM), X-ray diffraction (XRD), and scanning transmission electron microscopy (STEM).

Original language	English
Title of host publication	Metal Oxide-Based Thin Film Structures
Subtitle of host publication	Formation, Characterization and Application of Interface-Based Phenomena
Publisher	Elsevier
Pages	27-52
Number of pages	26
ISBN (Electronic)	9780081017524
ISBN (Print)	9780128111666
DOIs	https://doi.org/10.1016/B978-0-12-811166-6.00002-9
Publication status	Published - 21 Sept 2017

Publication series

Name	Metal Oxide Series

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10.1016/B978-0-12-811166-6.00002-9

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AB - In this chapter, a brief overview of examples is given of the use of pulsed laser deposition (PLD) for the fabrication of complex oxide superlattices. Attention is paid to practical issues, such as the choice of substrates and subsequent surface treatments, the observation of the type of growth that occurs, and growth rate calibration, both using in situ monitoring by RHEED as well as ex situ characterization by atomic force microscopy (AFM), X-ray diffraction (XRD), and scanning transmission electron microscopy (STEM).

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Oxide superlattices by PLD: A practical guide

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