Oxide superlattices by PLD: A practical guide

Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

Abstract

In this chapter, a brief overview of examples is given of the use of pulsed laser deposition (PLD) for the fabrication of complex oxide superlattices. Attention is paid to practical issues, such as the choice of substrates and subsequent surface treatments, the observation of the type of growth that occurs, and growth rate calibration, both using in situ monitoring by RHEED as well as ex situ characterization by atomic force microscopy (AFM), X-ray diffraction (XRD), and scanning transmission electron microscopy (STEM).
Original languageEnglish
Title of host publicationMetal Oxide-Based Thin Film Structures
Subtitle of host publicationFormation, Characterization and Application of Interface-Based Phenomena
PublisherElsevier
Pages27-52
Number of pages26
ISBN (Electronic)9780081017524
ISBN (Print)9780128111666
DOIs
Publication statusPublished - 21 Sep 2017

Publication series

NameMetal Oxide Series

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