Package stress reduction for micromechanical sensors: application in a pressure sensor

V.L. Spiering

Research output: Thesis › PhD Thesis - Research UT, graduation UT

Original language	Undefined
Awarding Institution	University of Twente
Supervisors/Advisors	Fluitman, J.H.J., Supervisor Tijdeman, H., Supervisor Elwenspoek, Michael Curt, Advisor
Award date	16 Dec 1994
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	90-9007692-1
Publication status	Published - 16 Dec 1994

Keywords

@phdthesis{b8e8acd4ccfd4df59571c21982df5efb,

title = "Package stress reduction for micromechanical sensors: application in a pressure sensor",

keywords = "METIS-111366",

author = "V.L. Spiering",

year = "1994",

month = dec,

day = "16",

language = "Undefined",

isbn = "90-9007692-1",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}