Packaged stainless steel flowsensor

P.J. Leussink, Henricus V. Jansen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


    There are many thermal flowsensors that are realised with MEMS/MST-techniques. All these sensors consisted of one or more heating elements and one or more sensing elements. Thermocouples [2],[3] or resistors [1] were used as sensing elements, and membranes [2] or bridges [1] as sensing structures. Main disadvantages of the sensors mentioned are the vulnerability and problems encountered with packaging and compatibility of the materials compared to the demands of food or pharmaceutical industry. The sensor presented here is created using a combination of MEMS/MST-techniques and stainless steel processing. This combination allows the realisation of a flowsensor that is strongly build, and has only stainless steel parts at the ‘wet side’ (e.g. the side in contact with the flow). And because stainless steel is used as bulk material for the sensor, a package is relatively easy created. This contribution will provide some details on the realisation of the sensor, as well as some experimental results
    Original languageUndefined
    Title of host publicationProceedings of Sensor Technology 2001 Conference
    EditorsM. Elwenspoek, Michael Curt Elwenspoek
    Place of PublicationDordrecht
    ISBN (Print)0-7923-7012-0
    Publication statusPublished - 14 May 2001
    EventSensor Technology Conference 2001 - Enschede, Netherlands
    Duration: 14 May 200115 May 2001


    ConferenceSensor Technology Conference 2001


    • METIS-200192
    • IR-42014

    Cite this