Packaged stainless steel flowsensor

P.J. Leussink; Henricus V. Jansen

doi:10.1007/978-94-010-0840-2_30

Packaged stainless steel flowsensor

P.J. Leussink, Henricus V. Jansen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

There are many thermal flowsensors that are realised with MEMS/MST-techniques. All these sensors consisted of one or more heating elements and one or more sensing elements. Thermocouples [2],[3] or resistors [1] were used as sensing elements, and membranes [2] or bridges [1] as sensing structures. Main disadvantages of the sensors mentioned are the vulnerability and problems encountered with packaging and compatibility of the materials compared to the demands of food or pharmaceutical industry. The sensor presented here is created using a combination of MEMS/MST-techniques and stainless steel processing. This combination allows the realisation of a flowsensor that is strongly build, and has only stainless steel parts at the ‘wet side’ (e.g. the side in contact with the flow). And because stainless steel is used as bulk material for the sensor, a package is relatively easy created. This contribution will provide some details on the realisation of the sensor, as well as some experimental results

Original language	Undefined
Title of host publication	Proceedings of Sensor Technology 2001 Conference
Editors	M. Elwenspoek, Michael Curt Elwenspoek
Place of Publication	Dordrecht
Publisher	Kluwer
Pages	173-178
ISBN (Print)	0-7923-7012-0
DOIs	https://doi.org/10.1007/978-94-010-0840-2_30
Publication status	Published - 14 May 2001
Event	Sensor Technology Conference 2001 - Enschede, Netherlands Duration: 14 May 2001 → 15 May 2001

Conference

Conference	Sensor Technology Conference 2001
Country	Netherlands
City	Enschede
Period	14/05/01 → 15/05/01

Keywords

METIS-200192
IR-42014

Access to Document

10.1007/978-94-010-0840-2_30

Cite this

@inproceedings{ed1a58cad6dc427c9594af81b51b2ccb,

title = "Packaged stainless steel flowsensor",

abstract = "There are many thermal flowsensors that are realised with MEMS/MST-techniques. All these sensors consisted of one or more heating elements and one or more sensing elements. Thermocouples [2],[3] or resistors [1] were used as sensing elements, and membranes [2] or bridges [1] as sensing structures. Main disadvantages of the sensors mentioned are the vulnerability and problems encountered with packaging and compatibility of the materials compared to the demands of food or pharmaceutical industry. The sensor presented here is created using a combination of MEMS/MST-techniques and stainless steel processing. This combination allows the realisation of a flowsensor that is strongly build, and has only stainless steel parts at the {\textquoteleft}wet side{\textquoteright} (e.g. the side in contact with the flow). And because stainless steel is used as bulk material for the sensor, a package is relatively easy created. This contribution will provide some details on the realisation of the sensor, as well as some experimental results",

keywords = "METIS-200192, IR-42014",

author = "P.J. Leussink and Jansen, {Henricus V.}",

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editor = "M. Elwenspoek and Elwenspoek, {Michael Curt}",

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N2 - There are many thermal flowsensors that are realised with MEMS/MST-techniques. All these sensors consisted of one or more heating elements and one or more sensing elements. Thermocouples [2],[3] or resistors [1] were used as sensing elements, and membranes [2] or bridges [1] as sensing structures. Main disadvantages of the sensors mentioned are the vulnerability and problems encountered with packaging and compatibility of the materials compared to the demands of food or pharmaceutical industry. The sensor presented here is created using a combination of MEMS/MST-techniques and stainless steel processing. This combination allows the realisation of a flowsensor that is strongly build, and has only stainless steel parts at the ‘wet side’ (e.g. the side in contact with the flow). And because stainless steel is used as bulk material for the sensor, a package is relatively easy created. This contribution will provide some details on the realisation of the sensor, as well as some experimental results

AB - There are many thermal flowsensors that are realised with MEMS/MST-techniques. All these sensors consisted of one or more heating elements and one or more sensing elements. Thermocouples [2],[3] or resistors [1] were used as sensing elements, and membranes [2] or bridges [1] as sensing structures. Main disadvantages of the sensors mentioned are the vulnerability and problems encountered with packaging and compatibility of the materials compared to the demands of food or pharmaceutical industry. The sensor presented here is created using a combination of MEMS/MST-techniques and stainless steel processing. This combination allows the realisation of a flowsensor that is strongly build, and has only stainless steel parts at the ‘wet side’ (e.g. the side in contact with the flow). And because stainless steel is used as bulk material for the sensor, a package is relatively easy created. This contribution will provide some details on the realisation of the sensor, as well as some experimental results

KW - METIS-200192

KW - IR-42014

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