Parallel-beams/lever electrothermal out-of-plane actuator

S. Deladi, G. Krijnen, M.C. Elwenspoek

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    Abstract

    We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.
    Original languageEnglish
    Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003
    Place of PublicationLos Alamitos, CA
    PublisherIEEE
    Pages103-107
    Number of pages5
    ISBN (Print)0-7803-7066-X
    DOIs
    Publication statusPublished - Jul 2003
    Event2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003 - Mandelieu-La Napoule, France
    Duration: 5 May 20037 May 2003

    Conference

    Conference2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003
    Abbreviated titleDTIP
    CountryFrance
    CityMandelieu-La Napoule
    Period5/05/037/05/03

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