Parallel-beams/lever electrothermal out-of-plane actuator

S. Deladi; G. Krijnen; M.C. Elwenspoek

doi:10.1109/DTIP.2003.1287017

Parallel-beams/lever electrothermal out-of-plane actuator

S. Deladi, G. Krijnen, M.C. Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.

Original language	English
Title of host publication	Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003
Place of Publication	Los Alamitos, CA
Publisher	IEEE
Pages	103-107
Number of pages	5
ISBN (Print)	0-7803-7066-X
DOIs	https://doi.org/10.1109/DTIP.2003.1287017
Publication status	Published - Jul 2003
Event	2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003 - Mandelieu-La Napoule, France Duration: 5 May 2003 → 7 May 2003

Conference

Conference	2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003
Abbreviated title	DTIP
Country/Territory	France
City	Mandelieu-La Napoule
Period	5/05/03 → 7/05/03

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10.1109/DTIP.2003.1287017

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title = "Parallel-beams/lever electrothermal out-of-plane actuator",

abstract = "We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.",

author = "S. Deladi and G. Krijnen and M.C. Elwenspoek",

year = "2003",

month = jul,

doi = "10.1109/DTIP.2003.1287017",

language = "English",

isbn = "0-7803-7066-X",

pages = "103--107",

booktitle = "Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003",

publisher = "IEEE",

address = "United States",

note = "2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003, DTIP ; Conference date: 05-05-2003 Through 07-05-2003",

}

Deladi, S, Krijnen, G & Elwenspoek, MC 2003, Parallel-beams/lever electrothermal out-of-plane actuator. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. IEEE, Los Alamitos, CA, pp. 103-107, 2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003, Mandelieu-La Napoule, France, 5/05/03. https://doi.org/10.1109/DTIP.2003.1287017

TY - GEN

T1 - Parallel-beams/lever electrothermal out-of-plane actuator

AU - Deladi, S.

AU - Krijnen, G.

AU - Elwenspoek, M.C.

PY - 2003/7

Y1 - 2003/7

N2 - We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.

AB - We report on the design, modeling, fabrication and testing of a new electrothermal actuator allowing for various modes of movement and exhibiting large enough forces to be usable in a micro-tribotester. The performance of the actuator has been simulated combining numerical and analytical calculations. Experiments have been performed in ambient conditions and vacuum. The theoretical results and measurements are consistent if the temperature dependence of the properties of the polycrystalline Si is taken into account.

U2 - 10.1109/DTIP.2003.1287017

DO - 10.1109/DTIP.2003.1287017

M3 - Conference contribution

SN - 0-7803-7066-X

SP - 103

EP - 107

BT - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003

PB - IEEE

CY - Los Alamitos, CA

T2 - 2003 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2003

Y2 - 5 May 2003 through 7 May 2003

ER -

Parallel-beams/lever electrothermal out-of-plane actuator

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