Parallel Nanodevice Fabrication Using a Combination of Shadow Mask and Scanning Probe Methods

R. Luthi, R.R. Schlittler, J.P. Brugger, P. Vettiger, M.E. Welland, J.K. Gimzewski

    Research output: Contribution to journalArticleAcademicpeer-review

    102 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)1314-1316
    JournalApplied physics letters
    Volume1999
    Issue number75-9
    Publication statusPublished - 1999

    Keywords

    • METIS-111671

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