Parallel Nanodevice Fabrication Using a Combination of Shadow Mask and Scanning Probe Methods

R. Luthi, R.R. Schlittler, J.P. Brugger, P. Vettiger, M.E. Welland, J.K. Gimzewski

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "Parallel Nanodevice Fabrication Using a Combination of Shadow Mask and Scanning Probe Methods",

keywords = "METIS-111671",

author = "R. Luthi and R.R. Schlittler and J.P. Brugger and P. Vettiger and M.E. Welland and J.K. Gimzewski",

year = "1999",

language = "Undefined",

volume = "1999",

pages = "1314--1316",

journal = "Applied physics letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

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TY - JOUR

T1 - Parallel Nanodevice Fabrication Using a Combination of Shadow Mask and Scanning Probe Methods

AU - Luthi, R.

AU - Schlittler, R.R.

AU - Brugger, J.P.

AU - Vettiger, P.

AU - Welland, M.E.

AU - Gimzewski, J.K.

PY - 1999

Y1 - 1999

KW - METIS-111671

M3 - Article

SN - 0003-6951

VL - 1999

SP - 1314

EP - 1316

JO - Applied physics letters

JF - Applied physics letters

IS - 75-9

ER -