Parallel optical readout of a cantilever array in dynamic mode

W.W. Koelmans, J.W. van Honschoten, P. Vettiger, Leon Abelmann, Michael Curt Elwenspoek

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    Abstract

    In this work we present parallel optical readout of a cantilever array which operates in dynamic mode using a standard optical beam deflection configuration containing only one laser-detector pair. We show accurate readout of the resonance frequency shift of an individual cantilever within an array by designing arrays where each cantilever has a different resonance frequency. The different resonance frequencies are created by giving each cantilever a different length and allow parallel readout of all cantilevers within the array. We show that even if the cantilevers are closely spaced each cantilever resonance frequency can be individually tracked without signs of cross-talk at current measurement precision (below 12 mHz). Interference of the laser light reflecting of each cantilever is observed when the amplitude of the cantilever is on the order of the wavelength of the laser light.
    Original languageUndefined
    Title of host publicationProceedings of the International Workshop on Nanomechanical cantilever sensors 2009
    Place of PublicationJeju Korea
    PublisherSmart Materials and Sensors Laboratory
    Pages-
    Number of pages1
    ISBN (Print)not assigned
    Publication statusPublished - May 2009

    Publication series

    Name
    PublisherSmart Materials and Sensors Laboratory

    Keywords

    • METIS-264013
    • IR-67989
    • TST-Stobots: Storage Robots
    • EC Grant Agreement nr.: FP6/034719
    • TST-SMI: Formerly in EWI-SMI
    • EWI-16038

    Cite this

    Koelmans, W. W., van Honschoten, J. W., Vettiger, P., Abelmann, L., & Elwenspoek, M. C. (2009). Parallel optical readout of a cantilever array in dynamic mode. In Proceedings of the International Workshop on Nanomechanical cantilever sensors 2009 (pp. -). Jeju Korea: Smart Materials and Sensors Laboratory.