Parallel optical readout of cantilever arrays in dynamic mode

W.W. Koelmans, J.W. van Honschoten, Jeroen de Vries, P. Vettiger, Leon Abelmann, Michael Curt Elwenspoek

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    Parallel frequency readout of an array of cantilevers is demonstrated using optical beam deflection with a single laser–diode pair. Multi-frequency addressing makes the individual nanomechanical response of each cantilever distinguishable within the received signal. Addressing is accomplished by exciting the array with the sum of all cantilever resonant frequencies. This technique requires considerably less hardware compared to other parallel optical readout techniques. Readout is demonstrated in beam deflection mode and interference mode. Many cantilevers can be readout in parallel, limited by the oscillators' quality factor and available bandwidth. The proposed technique facilitates parallelism in applications at the nano-scale, including probe-based data storage and biological sensing.
    Original languageUndefined
    Pages (from-to)395503-395506
    Number of pages4
    Issue number39
    Publication statusPublished - 6 Sept 2010


    • EWI-18726
    • Electronics and devices Optics
    • TST-SMI: Formerly in EWI-SMI
    • EC Grant Agreement nr.: FP6/034719
    • TST-uSPAM: micro Scanning Probe Array Memory
    • IR-72960
    • quantum optics and lasers Nanoscale science and low-D systems
    • METIS-271112

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