Parallel plate structures for optical modulation and casimir force measurement

M.B. Syed Nawazuddin; Remco J. Wiegerink; Theodorus S.J. Lammerink; Michael Curt Elwenspoek

Parallel plate structures for optical modulation and casimir force measurement

M.B. Syed Nawazuddin, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Integrated optical switches using mechano-optical sensing are gaining more attention in many fields due to their fast switching speed, large bandwidth and compact devices. In this paper, a micromachined electrostatically actuated metal plate to sense the evanescent field above the waveguide is presented. The feasibility of MEMS based light weight mechanical plates to achieve fast switching is evaluated. With decreasing distance between the suspended plate and the substrate it gets more difficult to control the gap due to forces resulting from parasitic charging and the Casimir effect. Measurement of the Casimir force between parallel plates at sub-micron distance is also cumbersome. A methodology to measure the Casimir force between parallel plates is presented here. The prime objective of this research is to come up with an ultra fast optical switch using parallel plates and also to measure the Casimir force between them.

Original language	Undefined
Title of host publication	MME 09 - Proceedings 20th MicroMechanics Europe 2009
Place of Publication	Toulouse
Publisher	LAAS-CNRS
Pages	1-4
Number of pages	4
ISBN (Print)	not assigned
Publication status	Published - 22 Sep 2009
Event	20th Micromechanics Europe Workshop, MME 2009 - Toulouse, France Duration: 21 Sep 2009 → 23 Sep 2009 Conference number: 20

Publication series

Name
Publisher	Laas-CNRS

Conference

Conference	20th Micromechanics Europe Workshop, MME 2009
Abbreviated title	MME
Country	France
City	Toulouse
Period	21/09/09 → 23/09/09

Keywords

METIS-264144
Casimir force
IR-68536
EWI-16494
Parallel plates
Electrostatic actuation
evanescent field sensing

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Cite this

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title = "Parallel plate structures for optical modulation and casimir force measurement",

abstract = "Integrated optical switches using mechano-optical sensing are gaining more attention in many fields due to their fast switching speed, large bandwidth and compact devices. In this paper, a micromachined electrostatically actuated metal plate to sense the evanescent field above the waveguide is presented. The feasibility of MEMS based light weight mechanical plates to achieve fast switching is evaluated. With decreasing distance between the suspended plate and the substrate it gets more difficult to control the gap due to forces resulting from parasitic charging and the Casimir effect. Measurement of the Casimir force between parallel plates at sub-micron distance is also cumbersome. A methodology to measure the Casimir force between parallel plates is presented here. The prime objective of this research is to come up with an ultra fast optical switch using parallel plates and also to measure the Casimir force between them.",

keywords = "METIS-264144, Casimir force, IR-68536, EWI-16494, Parallel plates, Electrostatic actuation, evanescent field sensing",

author = "{Syed Nawazuddin}, M.B. and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Elwenspoek, {Michael Curt}",

note = "http://www.mme2009.org/proceedings/Proceedings-final-complet.pdf; null ; Conference date: 21-09-2009 Through 23-09-2009",

year = "2009",

month = sep,

day = "22",

language = "Undefined",

isbn = "not assigned",

publisher = "LAAS-CNRS",

pages = "1--4",

booktitle = "MME 09 - Proceedings 20th MicroMechanics Europe 2009",

}

Parallel plate structures for optical modulation and casimir force measurement. / Syed Nawazuddin, M.B.; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Elwenspoek, Michael Curt.

MME 09 - Proceedings 20th MicroMechanics Europe 2009. Toulouse : LAAS-CNRS, 2009. p. 1-4.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Parallel plate structures for optical modulation and casimir force measurement

AU - Syed Nawazuddin, M.B.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 20

PY - 2009/9/22

Y1 - 2009/9/22

N2 - Integrated optical switches using mechano-optical sensing are gaining more attention in many fields due to their fast switching speed, large bandwidth and compact devices. In this paper, a micromachined electrostatically actuated metal plate to sense the evanescent field above the waveguide is presented. The feasibility of MEMS based light weight mechanical plates to achieve fast switching is evaluated. With decreasing distance between the suspended plate and the substrate it gets more difficult to control the gap due to forces resulting from parasitic charging and the Casimir effect. Measurement of the Casimir force between parallel plates at sub-micron distance is also cumbersome. A methodology to measure the Casimir force between parallel plates is presented here. The prime objective of this research is to come up with an ultra fast optical switch using parallel plates and also to measure the Casimir force between them.

AB - Integrated optical switches using mechano-optical sensing are gaining more attention in many fields due to their fast switching speed, large bandwidth and compact devices. In this paper, a micromachined electrostatically actuated metal plate to sense the evanescent field above the waveguide is presented. The feasibility of MEMS based light weight mechanical plates to achieve fast switching is evaluated. With decreasing distance between the suspended plate and the substrate it gets more difficult to control the gap due to forces resulting from parasitic charging and the Casimir effect. Measurement of the Casimir force between parallel plates at sub-micron distance is also cumbersome. A methodology to measure the Casimir force between parallel plates is presented here. The prime objective of this research is to come up with an ultra fast optical switch using parallel plates and also to measure the Casimir force between them.

KW - METIS-264144

KW - Casimir force

KW - IR-68536

KW - EWI-16494

KW - Parallel plates

KW - Electrostatic actuation

KW - evanescent field sensing

M3 - Conference contribution

SN - not assigned

SP - 1

EP - 4

BT - MME 09 - Proceedings 20th MicroMechanics Europe 2009

PB - LAAS-CNRS

CY - Toulouse

Y2 - 21 September 2009 through 23 September 2009

ER -