Parallel plate structures for optical modulation and casimir force measurement

M.B. Syed Nawazuddin, Remco J. Wiegerink, Theodorus S.J. Lammerink, Michael Curt Elwenspoek

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    Integrated optical switches using mechano-optical sensing are gaining more attention in many fields due to their fast switching speed, large bandwidth and compact devices. In this paper, a micromachined electrostatically actuated metal plate to sense the evanescent field above the waveguide is presented. The feasibility of MEMS based light weight mechanical plates to achieve fast switching is evaluated. With decreasing distance between the suspended plate and the substrate it gets more difficult to control the gap due to forces resulting from parasitic charging and the Casimir effect. Measurement of the Casimir force between parallel plates at sub-micron distance is also cumbersome. A methodology to measure the Casimir force between parallel plates is presented here. The prime objective of this research is to come up with an ultra fast optical switch using parallel plates and also to measure the Casimir force between them.
    Original languageUndefined
    Title of host publicationMME 09 - Proceedings 20th MicroMechanics Europe 2009
    Place of PublicationToulouse
    Number of pages4
    ISBN (Print)not assigned
    Publication statusPublished - 22 Sep 2009
    Event20th Micromechanics Europe Workshop, MME 2009 - Toulouse, France
    Duration: 21 Sep 200923 Sep 2009
    Conference number: 20

    Publication series



    Conference20th Micromechanics Europe Workshop, MME 2009
    Abbreviated titleMME


    • METIS-264144
    • Casimir force
    • IR-68536
    • EWI-16494
    • Parallel plates
    • Electrostatic actuation
    • evanescent field sensing

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