TY - JOUR
T1 - Parameter study of in-situ grown superconducting YBaCuO thin films prepared by laser ablation
AU - Blank, D.H.A.
AU - Adelerhof, D.J.
AU - Flokstra, J.
AU - Rogalla, H.
PY - 1989
Y1 - 1989
N2 - A parameter study has been made of YBaCuO thin films prepared by laser oblation. The films were deposited on SrTiO3, MgO, and Si with ZrO2 buffer layer at substrate temperatures between 600°C – 800°C. With optimization of different parameters like substrate temperature, pulse frequency, target-substrate distance, and oxygen pressure, zero resistivity was derived for the in-situ grown films on SrTiO3 at 89.5 K, on MgO at 84.6 K, and on Si (ZrO2) at 83.5 K.
AB - A parameter study has been made of YBaCuO thin films prepared by laser oblation. The films were deposited on SrTiO3, MgO, and Si with ZrO2 buffer layer at substrate temperatures between 600°C – 800°C. With optimization of different parameters like substrate temperature, pulse frequency, target-substrate distance, and oxygen pressure, zero resistivity was derived for the in-situ grown films on SrTiO3 at 89.5 K, on MgO at 84.6 K, and on Si (ZrO2) at 83.5 K.
U2 - 10.1016/0921-4534(89)90949-0
DO - 10.1016/0921-4534(89)90949-0
M3 - Article
SN - 0921-4534
VL - 162-16
SP - 162
EP - 164
JO - Physica C
JF - Physica C
IS - 125
ER -