Parametric excitation of a micro Coriolis mass flow sensor

H. Droogendijk; Jarno Groenesteijn; J. Haneveld; Remco G.P. Sanders; Remco J. Wiegerink; Theodorus S.J. Lammerink; Joost Conrad Lötters; Gijsbertus J.M. Krijnen

doi:10.1063/1.4769094

Parametric excitation of a micro Coriolis mass flow sensor

H. Droogendijk, Jarno Groenesteijn, J. Haneveld, Remco G.P. Sanders, Remco J. Wiegerink, Theodorus S.J. Lammerink, Joost Conrad Lötters, Gijsbertus J.M. Krijnen

Research output: Contribution to journal › Article › Academic › peer-review

12 Citations (Scopus)

18 Downloads (Pure)

Abstract

We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

Original language	Undefined
Pages (from-to)	223511
Number of pages	3
Journal	Applied physics letters
Volume	101
Issue number	22
DOIs	https://doi.org/10.1063/1.4769094
Publication status	Published - 30 Nov 2012

Keywords

TST-SENSORS
Microsensors
Electrostatic devices
Pipe flow
flow measurement
Flow sensors
water meters
EWI-22611
METIS-293215
IR-82359
vibrations

Access to Document

10.1063/1.4769094

http://eprints.eemcs.utwente.nl/secure2/22611/01/APL_Coriolis_online_2012.pdf

Cite this

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title = "Parametric excitation of a micro Coriolis mass flow sensor",

abstract = "We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.",

keywords = "TST-SENSORS, Microsensors, Electrostatic devices, Pipe flow, flow measurement, Flow sensors, water meters, EWI-22611, METIS-293215, IR-82359, vibrations",

author = "H. Droogendijk and Jarno Groenesteijn and J. Haneveld and Sanders, {Remco G.P.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and L{\"o}tters, {Joost Conrad} and Krijnen, {Gijsbertus J.M.}",

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T1 - Parametric excitation of a micro Coriolis mass flow sensor

AU - Droogendijk, H.

AU - Groenesteijn, Jarno

AU - Haneveld, J.

AU - Sanders, Remco G.P.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

AU - Krijnen, Gijsbertus J.M.

N1 - eemcs-eprint-22611

PY - 2012/11/30

Y1 - 2012/11/30

N2 - We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

AB - We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

KW - TST-SENSORS

KW - Microsensors

KW - Electrostatic devices

KW - Pipe flow

KW - flow measurement

KW - Flow sensors

KW - water meters

KW - EWI-22611

KW - METIS-293215

KW - IR-82359

KW - vibrations

U2 - 10.1063/1.4769094

DO - 10.1063/1.4769094

M3 - Article

SN - 0003-6951

VL - 101

SP - 223511

JO - Applied physics letters

JF - Applied physics letters

IS - 22

ER -