Parametric excitation of a micro Coriolis mass flow sensor

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    We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.
    Original languageUndefined
    Pages (from-to)223511
    Number of pages3
    JournalApplied physics letters
    Issue number22
    Publication statusPublished - 30 Nov 2012


    • Microsensors
    • Electrostatic devices
    • Pipe flow
    • flow measurement
    • Flow sensors
    • water meters
    • EWI-22611
    • METIS-293215
    • IR-82359
    • vibrations

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