Parametric excitation of a micro Coriolis mass flow sensor

Research output: Contribution to journalArticleAcademicpeer-review

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2 Downloads (Pure)

Abstract

We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.
Original languageUndefined
Pages (from-to)223511
Number of pages3
JournalApplied physics letters
Volume101
Issue number22
DOIs
Publication statusPublished - 30 Nov 2012

Keywords

  • TST-SENSORS
  • Microsensors
  • Electrostatic devices
  • Pipe flow
  • flow measurement
  • Flow sensors
  • water meters
  • EWI-22611
  • METIS-293215
  • IR-82359
  • vibrations

Cite this

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title = "Parametric excitation of a micro Coriolis mass flow sensor",
abstract = "We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1{\%} full scale error.",
keywords = "TST-SENSORS, Microsensors, Electrostatic devices, Pipe flow, flow measurement, Flow sensors, water meters, EWI-22611, METIS-293215, IR-82359, vibrations",
author = "H. Droogendijk and Jarno Groenesteijn and J. Haneveld and Sanders, {Remco G.P.} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and L{\"o}tters, {Joost Conrad} and Krijnen, {Gijsbertus J.M.}",
note = "eemcs-eprint-22611",
year = "2012",
month = "11",
day = "30",
doi = "10.1063/1.4769094",
language = "Undefined",
volume = "101",
pages = "223511",
journal = "Applied physics letters",
issn = "0003-6951",
publisher = "American Institute of Physics",
number = "22",

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Parametric excitation of a micro Coriolis mass flow sensor. / Droogendijk, H.; Groenesteijn, Jarno; Haneveld, J.; Sanders, Remco G.P.; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Lötters, Joost Conrad; Krijnen, Gijsbertus J.M.

In: Applied physics letters, Vol. 101, No. 22, 30.11.2012, p. 223511.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Parametric excitation of a micro Coriolis mass flow sensor

AU - Droogendijk, H.

AU - Groenesteijn, Jarno

AU - Haneveld, J.

AU - Sanders, Remco G.P.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

AU - Krijnen, Gijsbertus J.M.

N1 - eemcs-eprint-22611

PY - 2012/11/30

Y1 - 2012/11/30

N2 - We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

AB - We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

KW - TST-SENSORS

KW - Microsensors

KW - Electrostatic devices

KW - Pipe flow

KW - flow measurement

KW - Flow sensors

KW - water meters

KW - EWI-22611

KW - METIS-293215

KW - IR-82359

KW - vibrations

U2 - 10.1063/1.4769094

DO - 10.1063/1.4769094

M3 - Article

VL - 101

SP - 223511

JO - Applied physics letters

JF - Applied physics letters

SN - 0003-6951

IS - 22

ER -