Parametric excitation of a micro Coriolis mass flow sensor

H. Droogendijk; Jarno Groenesteijn; J. Haneveld; Remco G.P. Sanders; Remco J. Wiegerink; Theodorus S.J. Lammerink; Joost Conrad Lötters; Gijsbertus J.M. Krijnen

doi:10.1063/1.4769094

Parametric excitation of a micro Coriolis mass flow sensor

H. Droogendijk
, Jarno Groenesteijn
, J. Haneveld
, Remco G.P. Sanders
, Remco J. Wiegerink
, Theodorus S.J. Lammerink
, Joost Conrad Lötters
, Gijsbertus J.M. Krijnen

Research output: Contribution to journal › Article › Academic › peer-review

12 Citations (Scopus)

18 Downloads (Pure)

Abstract

We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

Original language	English
Pages (from-to)	223511
Number of pages	3
Journal	Applied physics letters
Volume	101
Issue number	22
DOIs	https://doi.org/10.1063/1.4769094
Publication status	Published - 30 Nov 2012

Keywords

TST-SENSORS
Microsensors
Electrostatic devices
Pipe flow
flow measurement
Flow sensors
water meters
vibrations

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10.1063/1.4769094

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title = "Parametric excitation of a micro Coriolis mass flow sensor",

abstract = "We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1\% full scale error.",

keywords = "TST-SENSORS, Microsensors, Electrostatic devices, Pipe flow, flow measurement, Flow sensors, water meters, vibrations",

author = "H. Droogendijk and Jarno Groenesteijn and J. Haneveld and Sanders, \{Remco G.P.\} and Wiegerink, \{Remco J.\} and Lammerink, \{Theodorus S.J.\} and L{\"o}tters, \{Joost Conrad\} and Krijnen, \{Gijsbertus J.M.\}",

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doi = "10.1063/1.4769094",

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T1 - Parametric excitation of a micro Coriolis mass flow sensor

AU - Droogendijk, H.

AU - Groenesteijn, Jarno

AU - Haneveld, J.

AU - Sanders, Remco G.P.

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Lötters, Joost Conrad

AU - Krijnen, Gijsbertus J.M.

N1 - eemcs-eprint-22611

PY - 2012/11/30

Y1 - 2012/11/30

N2 - We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

AB - We demonstrate that a micro Coriolis mass flow sensor can be excited in its torsional movement by applying parametric excitation. Using AC-bias voltages for periodic electrostatic spring softening, the flow-filled tube exhibits a steady vibration at suitable voltage settings. Measurements show that the sensor for this type of excitation can be used to measure water flow rates within a range of 0±500 ul/h with an accuracy of 1% full scale error.

KW - TST-SENSORS

KW - Microsensors

KW - Electrostatic devices

KW - Pipe flow

KW - flow measurement

KW - Flow sensors

KW - water meters

KW - vibrations

U2 - 10.1063/1.4769094

DO - 10.1063/1.4769094

M3 - Article

SN - 0003-6951

VL - 101

SP - 223511

JO - Applied physics letters

JF - Applied physics letters

IS - 22

ER -

Parametric excitation of a micro Coriolis mass flow sensor

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Keywords

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