Particles in Semiconductor Processing

D. Martin Knotter, F. Wali

    Research output: Chapter in Book/Report/Conference proceedingChapterAcademicpeer-review

    4 Citations (Scopus)

    Abstract

    Advances in integrated circuits (ICs) have a high impact on society. These advances result in continuously increasing performance of home personal computers, higher density flash memory chips, faster wireless communication in combination with smaller antennas, and all kinds of combinations of the aforementioned components. The main characteristic of these advances has been the shrinking dimension of the features of which the ICs are made.
    Original languageUndefined
    Title of host publicationDevelopments in Surface Contamination and Cleaning - Methods for Removal of Particle Contaminants
    EditorsRajiv Kohli, Kashmiri L. Mittal
    Place of PublicationAmsterdam
    PublisherElsevier
    Pages81-120
    Number of pages40
    ISBN (Print)978-1-4377-7830-4
    DOIs
    Publication statusPublished - 2010

    Publication series

    Name
    PublisherElsevier

    Keywords

    • METIS-270298
    • EWI-18802
    • SC-ICRY: Integrated Circuit Reliability and Yield
    • IR-74666

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