Advances in integrated circuits (ICs) have a high impact on society. These advances result in continuously increasing performance of home personal computers, higher density flash memory chips, faster wireless communication in combination with smaller antennas, and all kinds of combinations of the aforementioned components. The main characteristic of these advances has been the shrinking dimension of the features of which the ICs are made.
|Title of host publication||Developments in Surface Contamination and Cleaning - Methods for Removal of Particle Contaminants|
|Editors||Rajiv Kohli, Kashmiri L. Mittal|
|Place of Publication||Amsterdam|
|Number of pages||40|
|Publication status||Published - 2010|
- SC-ICRY: Integrated Circuit Reliability and Yield