Passive polarization converter in SiON technology

T.M. Koster, Paul Lambeck

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    A passive polarization converter has been realized in silicon oxynitride (SiON) technology. The device is a grating assisted codirectional coupler consisting of segments of asymmetrically etched ridge waveguides. By using a double-masking technique, the fabrication of the device is tolerant with respect to the alignment of the required masks. Conversion efficiencies up to 0.98 (TE¿TM and TM¿TE) and insertion losses of 3 dB/cm have been measured. Using 2-D beam propagation method simulations, an observed beat pattern in the converter could be explained as due to a leaky mode, which is captured in the grating structure
    Original languageUndefined
    Pages (from-to)876-883
    JournalJournal of lightwave technology
    Issue number6
    Publication statusPublished - 2001


    • SiON
    • Design
    • Grating
    • polarization conversion
    • IR-55660

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