Pattern dependency of pure-boron-layer chemical-vapor depositions

V. Mohammadi*, W. B. De Boer, T. L.M. Scholtes, L. K. Nanver

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)

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    Engineering & Materials Science