Patterning on a combined focused ion- and e beam machine

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 16 May 2008

Keywords

  • METIS-252440

Cite this

@conference{1dc136e4ecad4b0ca290dce3f26f936e,
title = "Patterning on a combined focused ion- and e beam machine",
keywords = "METIS-252440",
author = "Segerink, {Franciscus B.}",
year = "2008",
month = "5",
day = "16",
language = "Undefined",
pages = "--",

}

Patterning on a combined focused ion- and e beam machine. / Segerink, Franciscus B.

2008. -.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Patterning on a combined focused ion- and e beam machine

AU - Segerink, Franciscus B.

PY - 2008/5/16

Y1 - 2008/5/16

KW - METIS-252440

M3 - Poster

SP - -

ER -