Patterning on a combined focused ion- and e beam machine

Franciscus B. Segerink

Research output: Contribution to conference › Poster › Other research output

Original languageUndefined
Pages-
Publication statusPublished - 16 May 2008
EventFIB workshop, University of Twente - Enschede
Duration: 16 May 2008 → …

Conference

ConferenceFIB workshop, University of Twente
CityEnschede
Period16/05/08 → …

Keywords

  • METIS-252440

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