| Original language | Undefined |
|---|---|
| Place of Publication | Amsterdam |
| Publication status | Published - 30 Sept 1998 |
Keywords
- METIS-114663
PbZrxTi(1-x)O3 films for MEMS
Research output: Other contribution › Other research output
Research output: Other contribution › Other research output
| Original language | Undefined |
|---|---|
| Place of Publication | Amsterdam |
| Publication status | Published - 30 Sept 1998 |