PECVD of SiOxNy-layers for optical applications

P.A.C. Groenen

    Research output: Contribution to conference › Poster › Other research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 21 Nov 1994
    EventCMO Conference 1994 - Lunteren, Netherlands
    Duration: 21 Nov 1994 → 21 Nov 1994

    Conference

    ConferenceCMO Conference 1994
    Country/TerritoryNetherlands
    CityLunteren
    Period21/11/94 → 21/11/94

    Keywords

    • METIS-133493

    Cite this