PECVD of SiOxNy layers for optical applications

P.A.C. Groenen, H. Albers

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 16 Nov 1994

    Keywords

    • METIS-114608

    Cite this

    Groenen, P. A. C., & Albers, H. (1994). PECVD of SiOxNy layers for optical applications. -.
    Groenen, P.A.C. ; Albers, H. / PECVD of SiOxNy layers for optical applications.
    @conference{9ac8d1317ec74d098573934329f582de,
    title = "PECVD of SiOxNy layers for optical applications",
    keywords = "METIS-114608",
    author = "P.A.C. Groenen and H. Albers",
    year = "1994",
    month = "11",
    day = "16",
    language = "Undefined",
    pages = "--",

    }

    Groenen, PAC & Albers, H 1994, 'PECVD of SiOxNy layers for optical applications' pp. -.

    PECVD of SiOxNy layers for optical applications. / Groenen, P.A.C.; Albers, H.

    1994. -.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - PECVD of SiOxNy layers for optical applications

    AU - Groenen, P.A.C.

    AU - Albers, H.

    PY - 1994/11/16

    Y1 - 1994/11/16

    KW - METIS-114608

    M3 - Poster

    SP - -

    ER -