PECVD of SiOxNy layers for optical applications

P.A.C. Groenen, H. Albers

    Research output: Contribution to conferencePoster

    Original languageUndefined
    Pages-
    Publication statusPublished - 16 Nov 1994
    EventFOM-IOP Werkdagen Electro-Optics 1994 - Veldhoven, Netherlands
    Duration: 15 Nov 199416 Nov 1994

    Conference

    ConferenceFOM-IOP Werkdagen Electro-Optics 1994
    CountryNetherlands
    CityVeldhoven
    Period15/11/9416/11/94

    Keywords

    • METIS-114608

    Cite this

    Groenen, P. A. C., & Albers, H. (1994). PECVD of SiOxNy layers for optical applications. -. Poster session presented at FOM-IOP Werkdagen Electro-Optics 1994, Veldhoven, Netherlands.