PECVD of SiOxNy layers for optical applications

P.A.C. Groenen, H. Albers

    Research output: Contribution to conferencePosterOther research output

    Original languageUndefined
    Pages-
    Publication statusPublished - 16 Nov 1994
    EventFOM-IOP Werkdagen Electro-Optics 1994 - Veldhoven, Netherlands
    Duration: 15 Nov 199416 Nov 1994

    Conference

    ConferenceFOM-IOP Werkdagen Electro-Optics 1994
    Country/TerritoryNetherlands
    CityVeldhoven
    Period15/11/9416/11/94

    Keywords

    • METIS-114608

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