PECVD SiOxNy films als planaire optische golfgeleiders

W.S. Bijlsma, H. Albers, Paul Lambeck, T.J.A. Popma

Research output: Contribution to conference › Poster › Other research output

Original language	Dutch
Pages	-
Publication status	Published - 8 May 1990
Event	FOM dagen 1990 - Veldhoven, Netherlands Duration: 28 Nov 1990 → 30 Nov 1990

Keywords

@conference{a16b4ef2beba4e2ea576432e0879b114,

title = "PECVD SiOxNy films als planaire optische golfgeleiders",

keywords = "METIS-133422",

author = "W.S. Bijlsma and H. Albers and Paul Lambeck and T.J.A. Popma",

year = "1990",

month = may,

day = "8",

language = "Dutch",

pages = "--",

note = "FOM dagen 1990 ; Conference date: 28-11-1990 Through 30-11-1990",

}