PECVD SiOxNy films als planaire optische golfgeleiders

W.S. Bijlsma, H. Albers, Paul Lambeck, T.J.A. Popma

    Research output: Contribution to conferencePoster

    Original languageDutch
    Pages-
    Publication statusPublished - 8 May 1990
    EventFOM dagen 1990 - Veldhoven, Netherlands
    Duration: 28 Nov 199030 Nov 1990

    Conference

    ConferenceFOM dagen 1990
    CountryNetherlands
    CityVeldhoven
    Period28/11/9030/11/90

    Keywords

    • METIS-133422

    Cite this

    Bijlsma, W. S., Albers, H., Lambeck, P., & Popma, T. J. A. (1990). PECVD SiOxNy films als planaire optische golfgeleiders. -. Poster session presented at FOM dagen 1990, Veldhoven, Netherlands.