PECVD SiOxNy films as planar optical waveguides

W.S. Bijlsma, H. Albers, Paul Lambeck, T.J.A. Popma

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publication5th Sensors & Actuators Symposium
    Place of PublicationEnschede
    Number of pages4
    Publication statusPublished - 15 Nov 1990


    • METIS-130280

    Cite this

    Bijlsma, W. S., Albers, H., Lambeck, P., & Popma, T. J. A. (1990). PECVD SiOxNy films as planar optical waveguides. In 5th Sensors & Actuators Symposium (pp. 233-236). Enschede.