PECVD SiOxNy films as planar optical waveguides

W.S. Bijlsma, H. Albers, Paul Lambeck, T.J.A. Popma

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publication5th Sensors & Actuators Symposium
    Place of PublicationEnschede
    Pages233-236
    Number of pages4
    Publication statusPublished - 15 Nov 1990

    Keywords

    • METIS-130280

    Cite this

    Bijlsma, W. S., Albers, H., Lambeck, P., & Popma, T. J. A. (1990). PECVD SiOxNy films as planar optical waveguides. In 5th Sensors & Actuators Symposium (pp. 233-236). Enschede.
    Bijlsma, W.S. ; Albers, H. ; Lambeck, Paul ; Popma, T.J.A. / PECVD SiOxNy films as planar optical waveguides. 5th Sensors & Actuators Symposium. Enschede, 1990. pp. 233-236
    @inproceedings{6d9fa2f6a5fc4331b3cd6173d07e81ad,
    title = "PECVD SiOxNy films as planar optical waveguides",
    keywords = "METIS-130280",
    author = "W.S. Bijlsma and H. Albers and Paul Lambeck and T.J.A. Popma",
    year = "1990",
    month = "11",
    day = "15",
    language = "Undefined",
    isbn = "9020124668",
    pages = "233--236",
    booktitle = "5th Sensors & Actuators Symposium",

    }

    Bijlsma, WS, Albers, H, Lambeck, P & Popma, TJA 1990, PECVD SiOxNy films as planar optical waveguides. in 5th Sensors & Actuators Symposium. Enschede, pp. 233-236.

    PECVD SiOxNy films as planar optical waveguides. / Bijlsma, W.S.; Albers, H.; Lambeck, Paul; Popma, T.J.A.

    5th Sensors & Actuators Symposium. Enschede, 1990. p. 233-236.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - PECVD SiOxNy films as planar optical waveguides

    AU - Bijlsma, W.S.

    AU - Albers, H.

    AU - Lambeck, Paul

    AU - Popma, T.J.A.

    PY - 1990/11/15

    Y1 - 1990/11/15

    KW - METIS-130280

    M3 - Conference contribution

    SN - 9020124668

    SP - 233

    EP - 236

    BT - 5th Sensors & Actuators Symposium

    CY - Enschede

    ER -

    Bijlsma WS, Albers H, Lambeck P, Popma TJA. PECVD SiOxNy films as planar optical waveguides. In 5th Sensors & Actuators Symposium. Enschede. 1990. p. 233-236