PECVD SiOxNy films as planar optical waveguides

W.S. Bijlsma, H. Albers, Paul Lambeck, T.J.A. Popma

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publication5th Sensors & Actuators Symposium
    Place of PublicationEnschede
    Pages233-236
    Number of pages4
    Publication statusPublished - 15 Nov 1990

    Keywords

    • METIS-130280

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