PECVD SiOxNy films as planar optical waveguides

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	5th Sensors & Actuators Symposium
Place of Publication	Enschede
Pages	233-236
Number of pages	4
Publication status	Published - 15 Nov 1990

Keywords

@inproceedings{6d9fa2f6a5fc4331b3cd6173d07e81ad,

title = "PECVD SiOxNy films as planar optical waveguides",

keywords = "METIS-130280",

author = "W.S. Bijlsma and H. Albers and Paul Lambeck and T.J.A. Popma",

year = "1990",

month = nov,

day = "15",

language = "Undefined",

isbn = "9020124668",

pages = "233--236",

booktitle = "5th Sensors \& Actuators Symposium",

}