Performance analysis of on-chip coupled piezo/photodiodes, a numerical study

Nasim Rezaei; Zeinab Eftekhari; Jian-Yao Zheng; Rebecca Saive

doi:10.1016/j.sna.2023.114690

Performance analysis of on-chip coupled piezo/photodiodes, a numerical study

Nasim Rezaei
, Zeinab Eftekhari
, Jian-Yao Zheng
, Rebecca Saive^*

^*Corresponding author for this work

Inorganic Materials Science

Research output: Contribution to journal › Article › Academic › peer-review

2 Citations (Scopus)

132 Downloads (Pure)

Abstract

We are presenting a numerical approach to calculate the mechanical efficiency of piezo-photomotion devices, which consist of piezoelectric actuators, integrated with silicon solar cells. Such devices provide conversion of optical energy to mechanical energy and pave the way for remote-controlled micro and nanorobots. We demonstrate that the mechanical efficiency is almost independent of the input voltage and can reach 0.06% under a simple point force load, when the backside etching of the silicon substrate, i.e. the diaphragm is 8 mm in diameter and 30 µm in thickness. This study offers guidelines for future design improvements.

Original language	English
Article number	114690
Number of pages	8
Journal	Sensors and Actuators A: Physical
Volume	363
Early online date	26 Sept 2023
DOIs	https://doi.org/10.1016/j.sna.2023.114690
Publication status	Published - 1 Dec 2023

Keywords

FEM modelling
Light actuation
Mechanical efficiency
Piezoelectric
Solar cell
UT-Hybrid-D

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.sna.2023.114690Licence: CC BY

ArticleFinal published version, 5 MBLicence: CC BY

Cite this

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title = "Performance analysis of on-chip coupled piezo/photodiodes, a numerical study",

abstract = "We are presenting a numerical approach to calculate the mechanical efficiency of piezo-photomotion devices, which consist of piezoelectric actuators, integrated with silicon solar cells. Such devices provide conversion of optical energy to mechanical energy and pave the way for remote-controlled micro and nanorobots. We demonstrate that the mechanical efficiency is almost independent of the input voltage and can reach 0.06\% under a simple point force load, when the backside etching of the silicon substrate, i.e. the diaphragm is 8 mm in diameter and 30 µm in thickness. This study offers guidelines for future design improvements.",

keywords = "FEM modelling, Light actuation, Mechanical efficiency, Piezoelectric, Solar cell, UT-Hybrid-D",

author = "Nasim Rezaei and Zeinab Eftekhari and Jian-Yao Zheng and Rebecca Saive",

note = "Publisher Copyright: {\textcopyright} 2023 The Authors",

year = "2023",

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doi = "10.1016/j.sna.2023.114690",

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AU - Rezaei, Nasim

AU - Eftekhari, Zeinab

AU - Zheng, Jian-Yao

AU - Saive, Rebecca

PY - 2023/12/1

Y1 - 2023/12/1

N2 - We are presenting a numerical approach to calculate the mechanical efficiency of piezo-photomotion devices, which consist of piezoelectric actuators, integrated with silicon solar cells. Such devices provide conversion of optical energy to mechanical energy and pave the way for remote-controlled micro and nanorobots. We demonstrate that the mechanical efficiency is almost independent of the input voltage and can reach 0.06% under a simple point force load, when the backside etching of the silicon substrate, i.e. the diaphragm is 8 mm in diameter and 30 µm in thickness. This study offers guidelines for future design improvements.

AB - We are presenting a numerical approach to calculate the mechanical efficiency of piezo-photomotion devices, which consist of piezoelectric actuators, integrated with silicon solar cells. Such devices provide conversion of optical energy to mechanical energy and pave the way for remote-controlled micro and nanorobots. We demonstrate that the mechanical efficiency is almost independent of the input voltage and can reach 0.06% under a simple point force load, when the backside etching of the silicon substrate, i.e. the diaphragm is 8 mm in diameter and 30 µm in thickness. This study offers guidelines for future design improvements.

KW - FEM modelling

KW - Light actuation

KW - Mechanical efficiency

KW - Piezoelectric

KW - Solar cell

KW - UT-Hybrid-D

UR - https://www.scopus.com/pages/publications/85173484589

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DO - 10.1016/j.sna.2023.114690

M3 - Article

AN - SCOPUS:85173484589

SN - 0924-4247

VL - 363

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

M1 - 114690

ER -

Performance analysis of on-chip coupled piezo/photodiodes, a numerical study

Abstract

Keywords

UN SDGs

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Additional data for the paper: Free-Space Diffused Light Collimation and Concentration

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Performance analysis of on-chip coupled piezo/photodiodes, a numerical study

Abstract

Keywords

UN SDGs

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Other files and links

Fingerprint

Datasets

Additional data for the paper: Free-Space Diffused Light Collimation and Concentration

Cite this