Performance of thermally excited resonators

T.S.J. Lammerink; M. Elwenspoek; R.H. van Ouwerkerk; S. Bouwstra; J.H.J. Fluitman

doi:10.1016/0924-4247(90)85070-K

Performance of thermally excited resonators

T.S.J. Lammerink, M. Elwenspoek, R.H. van Ouwerkerk, S. Bouwstra, J.H.J. Fluitman

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Abstract

A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.

Original language	English
Pages (from-to)	352-356
Number of pages	3
Journal	Sensors and Actuators A: Physical
Volume	21
Issue number	1-3
DOIs	https://doi.org/10.1016/0924-4247(90)85070-K
Publication status	Published - Feb 1990
Event	5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland Duration: 25 Jun 1989 → 30 Jun 1989 Conference number: 5

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title = "Performance of thermally excited resonators",

abstract = "A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.",

author = "T.S.J. Lammerink and M. Elwenspoek and {van Ouwerkerk}, R.H. and S. Bouwstra and J.H.J. Fluitman",

year = "1990",

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T1 - Performance of thermally excited resonators

AU - Lammerink, T.S.J.

AU - Elwenspoek, M.

AU - van Ouwerkerk, R.H.

AU - Bouwstra, S.

AU - Fluitman, J.H.J.

N1 - Conference code: 5

PY - 1990/2

Y1 - 1990/2

N2 - A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.

AB - A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.

U2 - 10.1016/0924-4247(90)85070-K

DO - 10.1016/0924-4247(90)85070-K

M3 - Article

SN - 0924-4247

VL - 21

SP - 352

EP - 356

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1-3

T2 - 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III

Y2 - 25 June 1989 through 30 June 1989

ER -

Performance of thermally excited resonators

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