Performance of thermally excited resonators

T.S.J. Lammerink, M. Elwenspoek, R.H. van Ouwerkerk, S. Bouwstra, J.H.J. Fluitman

    Research output: Contribution to journalArticleAcademicpeer-review

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    Abstract

    A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.
    Original languageEnglish
    Pages (from-to)352-356
    Number of pages3
    JournalSensors and actuators. A: Physical
    Volume21
    Issue number1-3
    DOIs
    Publication statusPublished - Feb 1990
    Event5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland
    Duration: 25 Jun 198930 Jun 1989
    Conference number: 5

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    Vibrations (mechanical)
    Resonators
    resonators
    vibration
    Silicon
    buckling
    thermal stresses
    Thermal stress
    Buckling
    Transducers
    Loads (forces)
    transducers
    Temperature distribution
    temperature distribution
    deviation
    Defects
    defects
    silicon
    excitation
    Experiments

    Cite this

    Lammerink, T. S. J., Elwenspoek, M., van Ouwerkerk, R. H., Bouwstra, S., & Fluitman, J. H. J. (1990). Performance of thermally excited resonators. Sensors and actuators. A: Physical, 21(1-3), 352-356. https://doi.org/10.1016/0924-4247(90)85070-K
    Lammerink, T.S.J. ; Elwenspoek, M. ; van Ouwerkerk, R.H. ; Bouwstra, S. ; Fluitman, J.H.J. / Performance of thermally excited resonators. In: Sensors and actuators. A: Physical. 1990 ; Vol. 21, No. 1-3. pp. 352-356.
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    abstract = "A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.",
    author = "T.S.J. Lammerink and M. Elwenspoek and {van Ouwerkerk}, R.H. and S. Bouwstra and J.H.J. Fluitman",
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    Lammerink, TSJ, Elwenspoek, M, van Ouwerkerk, RH, Bouwstra, S & Fluitman, JHJ 1990, 'Performance of thermally excited resonators', Sensors and actuators. A: Physical, vol. 21, no. 1-3, pp. 352-356. https://doi.org/10.1016/0924-4247(90)85070-K

    Performance of thermally excited resonators. / Lammerink, T.S.J.; Elwenspoek, M.; van Ouwerkerk, R.H.; Bouwstra, S.; Fluitman, J.H.J.

    In: Sensors and actuators. A: Physical, Vol. 21, No. 1-3, 02.1990, p. 352-356.

    Research output: Contribution to journalArticleAcademicpeer-review

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    AU - Fluitman, J.H.J.

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    AB - A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.

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    JO - Sensors and actuators. A: Physical

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    Lammerink TSJ, Elwenspoek M, van Ouwerkerk RH, Bouwstra S, Fluitman JHJ. Performance of thermally excited resonators. Sensors and actuators. A: Physical. 1990 Feb;21(1-3):352-356. https://doi.org/10.1016/0924-4247(90)85070-K