Performance of thermally excited resonators

T.S.J. Lammerink, M. Elwenspoek, R.H. van Ouwerkerk, S. Bouwstra, J.H.J. Fluitman

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    Abstract

    A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.
    Original languageEnglish
    Pages (from-to)352-356
    Number of pages3
    JournalSensors and actuators. A: Physical
    Volume21
    Issue number1-3
    DOIs
    Publication statusPublished - Feb 1990
    Event5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland
    Duration: 25 Jun 198930 Jun 1989
    Conference number: 5

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    Lammerink, T. S. J., Elwenspoek, M., van Ouwerkerk, R. H., Bouwstra, S., & Fluitman, J. H. J. (1990). Performance of thermally excited resonators. Sensors and actuators. A: Physical, 21(1-3), 352-356. https://doi.org/10.1016/0924-4247(90)85070-K