A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.
|Number of pages||3|
|Journal||Sensors and Actuators A: Physical|
|Publication status||Published - Feb 1990|
|Event||5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland|
Duration: 25 Jun 1989 → 30 Jun 1989
Conference number: 5