Performance of thermally excited resonators

T.S.J. Lammerink, M. Elwenspoek, R.H. van Ouwerkerk, S. Bouwstra, J.H.J. Fluitman

Research output: Contribution to journalArticleAcademicpeer-review

62 Citations (Scopus)
28 Downloads (Pure)

Abstract

A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.
Original languageEnglish
Pages (from-to)352-356
Number of pages3
JournalSensors and actuators. A: Physical
Volume21
Issue number1-3
DOIs
Publication statusPublished - Feb 1990
Event5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, Transducers '90 - Eurosensors III - Montreux, Switzerland
Duration: 25 Jun 198930 Jun 1989
Conference number: 5

Fingerprint

Vibrations (mechanical)
Resonators
resonators
vibration
Silicon
buckling
thermal stresses
Thermal stress
Buckling
Transducers
Loads (forces)
transducers
Temperature distribution
temperature distribution
deviation
Defects
defects
silicon
excitation
Experiments

Cite this

Lammerink, T.S.J. ; Elwenspoek, M. ; van Ouwerkerk, R.H. ; Bouwstra, S. ; Fluitman, J.H.J. / Performance of thermally excited resonators. In: Sensors and actuators. A: Physical. 1990 ; Vol. 21, No. 1-3. pp. 352-356.
@article{8572c071f776406b98561bb437a7389f,
title = "Performance of thermally excited resonators",
abstract = "A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.",
author = "T.S.J. Lammerink and M. Elwenspoek and {van Ouwerkerk}, R.H. and S. Bouwstra and J.H.J. Fluitman",
year = "1990",
month = "2",
doi = "10.1016/0924-4247(90)85070-K",
language = "English",
volume = "21",
pages = "352--356",
journal = "Sensors and actuators. A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1-3",

}

Performance of thermally excited resonators. / Lammerink, T.S.J.; Elwenspoek, M.; van Ouwerkerk, R.H.; Bouwstra, S.; Fluitman, J.H.J.

In: Sensors and actuators. A: Physical, Vol. 21, No. 1-3, 02.1990, p. 352-356.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Performance of thermally excited resonators

AU - Lammerink, T.S.J.

AU - Elwenspoek, M.

AU - van Ouwerkerk, R.H.

AU - Bouwstra, S.

AU - Fluitman, J.H.J.

PY - 1990/2

Y1 - 1990/2

N2 - A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.

AB - A study of electrothermal excitation of micro-machined silicon beams is reported. The temperature distribution is calculated as a function of the position of the transducer, resulting in stress in the structure which reduces the resonance frequency. Test samples are realized and measurements or resonance frequency, vibration shape and vibration amplitude are carried out. There is a satisfactory agreement between theory and experiment at small thermal stresses. Near the buckling load we find distinct deviations from theory which are ascribed to mechanical imperfections of the beams.

U2 - 10.1016/0924-4247(90)85070-K

DO - 10.1016/0924-4247(90)85070-K

M3 - Article

VL - 21

SP - 352

EP - 356

JO - Sensors and actuators. A: Physical

JF - Sensors and actuators. A: Physical

SN - 0924-4247

IS - 1-3

ER -