Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Research output: Contribution to conferencePoster

Original languageUndefined
Pages-
Publication statusPublished - 21 Jun 2012

Keywords

  • METIS-298875

Cite this

@conference{0cfcdbc7364e4fae890ea69daec14850,
title = "Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis",
keywords = "METIS-298875",
author = "Feng Liu and Sturm, {Jacobus Marinus} and Lee, {Christopher James} and Frederik Bijkerk",
year = "2012",
month = "6",
day = "21",
language = "Undefined",
pages = "--",

}

TY - CONF

T1 - Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

AU - Liu, Feng

AU - Sturm, Jacobus Marinus

AU - Lee, Christopher James

AU - Bijkerk, Frederik

PY - 2012/6/21

Y1 - 2012/6/21

KW - METIS-298875

M3 - Poster

SP - -

ER -