Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 21 Jun 2012
Event	13th ASML TC Conference: Tertiary Ellipsometry with random polarization state - Veldhoven Duration: 16 Jan 2012 → …

Keywords

@conference{0cfcdbc7364e4fae890ea69daec14850,

title = "Photo-induced chemistry of EUV multilayer mirror surfaces: experimental set up for in situ studeis",

keywords = "METIS-298875",

author = "Feng Liu and Sturm, {Jacobus Marinus} and Lee, {Christopher James} and Frederik Bijkerk",

year = "2012",

month = jun,

day = "21",

language = "Undefined",

pages = "--",

note = "13th ASML TC Conference ; Conference date: 16-01-2012",

}