Abstract
Preliminary results of a photon detector combining a Micromegas like multiplier coated with a UV-sensitive CsI photocathode are described. The multiplier is made in the CMOS compatible InGrid technology, which allows to post-process it directly on the surface of an imaging IC. This method is aimed at building light-sensitive imaging detectors where all elements are monolithically integrated. We show that the CsI photocathode deposited in the InGrid mesh does not alter the device performance. Maximum gains of ~6000 were reached in a singlegrid element operated in Ar/CH4, with a 2% Ion Back Flow fraction returning to the photocathode.
Original language | English |
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Title of host publication | Proceedings of the 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors |
Place of Publication | Utrecht, The Netherlands |
Publisher | STW |
Pages | 32-35 |
Number of pages | 4 |
ISBN (Print) | 978-90-73461-62-8 |
Publication status | Published - 26 Nov 2009 |
Event | 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 - Veldhoven, Netherlands Duration: 26 Nov 2009 → 27 Nov 2009 Conference number: 12 |
Publication series
Name | |
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Publisher | Technology Foundation STW |
Conference
Conference | 12th Annual Workshop on Semiconductor Advances for Future Electronics and Sensors, SAFE 2009 |
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Abbreviated title | SAFE |
Country/Territory | Netherlands |
City | Veldhoven |
Period | 26/11/09 → 27/11/09 |
Keywords
- CsI photocathode
- CMOS post-processing
- SC-RID: Radiation Imaging detectors
- MICROMEGAS
- Gaseous radiation detector
- UV photon detection