Photolitohography on microstructured surfaces using photosensitive polyimide

J. Munoz, R.E.G. van Hal, Piet Bergveld

Research output: Contribution to journal › Article › Academic › peer-review

Keywords

@article{3b4622fa470848f59e0c4c091a36b1b4,

title = "Photolitohography on microstructured surfaces using photosensitive polyimide",

keywords = "METIS-112183",

author = "J. Munoz and {van Hal}, R.E.G. and Piet Bergveld",

year = "1992",

language = "Undefined",

volume = "3",

pages = "345--358",

journal = "Sensors and materials",

issn = "0914-4935",

publisher = "M Y U Scientific Publishing Division",

number = "6",

}