Photolitohography on microstructured surfaces using photosensitive polyimide

J. Munoz, R.E.G. van Hal, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    54 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)345-358
    Number of pages14
    JournalSensors and materials
    Volume3
    Issue number6
    Publication statusPublished - 1992

    Keywords

    • METIS-112183

    Cite this

    Munoz, J., van Hal, R. E. G., & Bergveld, P. (1992). Photolitohography on microstructured surfaces using photosensitive polyimide. Sensors and materials, 3(6), 345-358.