Photolitohography on microstructured surfaces using photosensitive polyimide

J. Munoz, R.E.G. van Hal, Piet Bergveld

    Research output: Contribution to journalArticleAcademicpeer-review

    54 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)345-358
    Number of pages14
    JournalSensors and materials
    Volume3
    Issue number6
    Publication statusPublished - 1992

    Keywords

    • METIS-112183

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