| Original language | Undefined |
|---|---|
| Pages (from-to) | 345-358 |
| Number of pages | 14 |
| Journal | Sensors and materials |
| Volume | 3 |
| Issue number | 6 |
| Publication status | Published - 1992 |
Keywords
- METIS-112183
Cite this
Munoz, J., van Hal, R. E. G., & Bergveld, P. (1992). Photolitohography on microstructured surfaces using photosensitive polyimide. Sensors and materials, 3(6), 345-358.
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title = "Photolitohography on microstructured surfaces using photosensitive polyimide",
keywords = "METIS-112183",
author = "J. Munoz and {van Hal}, R.E.G. and Piet Bergveld",
year = "1992",
language = "Undefined",
volume = "3",
pages = "345--358",
journal = "Sensors and materials",
issn = "0914-4935",
publisher = "M Y U Scientific Publishing Division",
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}
Munoz, J, van Hal, REG & Bergveld, P 1992, 'Photolitohography on microstructured surfaces using photosensitive polyimide' Sensors and materials, vol. 3, no. 6, pp. 345-358.
Photolitohography on microstructured surfaces using photosensitive polyimide. / Munoz, J.; van Hal, R.E.G.; Bergveld, Piet.
In: Sensors and materials, Vol. 3, No. 6, 1992, p. 345-358.Research output: Contribution to journal › Article › Academic › peer-review
TY - JOUR
T1 - Photolitohography on microstructured surfaces using photosensitive polyimide
AU - Munoz, J.
AU - van Hal, R.E.G.
AU - Bergveld, Piet
PY - 1992
Y1 - 1992
KW - METIS-112183
M3 - Article
VL - 3
SP - 345
EP - 358
JO - Sensors and materials
JF - Sensors and materials
SN - 0914-4935
IS - 6
ER -
Munoz J, van Hal REG, Bergveld P. Photolitohography on microstructured surfaces using photosensitive polyimide. Sensors and materials. 1992;3(6):345-358.