Photolitohography on microstructured surfaces using photosensitive polyimide

J. Munoz, R.E.G. van Hal, Piet Bergveld

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined
Pages (from-to)345-358
Number of pages14
JournalSensors and materials
Volume3
Issue number6
Publication statusPublished - 1992

Keywords

  • METIS-112183

Cite this

Munoz, J., van Hal, R. E. G., & Bergveld, P. (1992). Photolitohography on microstructured surfaces using photosensitive polyimide. Sensors and materials, 3(6), 345-358.
Munoz, J. ; van Hal, R.E.G. ; Bergveld, Piet. / Photolitohography on microstructured surfaces using photosensitive polyimide. In: Sensors and materials. 1992 ; Vol. 3, No. 6. pp. 345-358.
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year = "1992",
language = "Undefined",
volume = "3",
pages = "345--358",
journal = "Sensors and materials",
issn = "0914-4935",
publisher = "M Y U Scientific Publishing Division",
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}

Munoz, J, van Hal, REG & Bergveld, P 1992, 'Photolitohography on microstructured surfaces using photosensitive polyimide' Sensors and materials, vol. 3, no. 6, pp. 345-358.

Photolitohography on microstructured surfaces using photosensitive polyimide. / Munoz, J.; van Hal, R.E.G.; Bergveld, Piet.

In: Sensors and materials, Vol. 3, No. 6, 1992, p. 345-358.

Research output: Contribution to journalArticleAcademicpeer-review

TY - JOUR

T1 - Photolitohography on microstructured surfaces using photosensitive polyimide

AU - Munoz, J.

AU - van Hal, R.E.G.

AU - Bergveld, Piet

PY - 1992

Y1 - 1992

KW - METIS-112183

M3 - Article

VL - 3

SP - 345

EP - 358

JO - Sensors and materials

JF - Sensors and materials

SN - 0914-4935

IS - 6

ER -