Photoluminescence-based detection of particle contamination on EUV reticle

An Gao, P.J. Rizo, L. Scaccabarozzi, C.J. Lee, V. Banine, F. Bijkerk

Research output: Contribution to conferenceAbstractOther research output

Original languageEnglish
Publication statusPublished - 12 Aug 2012
EventSPIE Optical Engineering + Applications 2012 - San Diego, United States
Duration: 12 Aug 201216 Aug 2012


ConferenceSPIE Optical Engineering + Applications 2012
Country/TerritoryUnited States
CitySan Diego


  • IR-83226
  • METIS-292768

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