Photoluminescence-based detection of particle contamination on EUV reticle

An Gao, P.J. Rizo, L. Scaccabarozzi, C.J. Lee, V. Banine, F. Bijkerk

Research output: Contribution to conference › Abstract › Other research output

Original language	English
Publication status	Published - 12 Aug 2012
Event	SPIE Optical Engineering + Applications 2012 - San Diego, United States Duration: 12 Aug 2012 → 16 Aug 2012

Conference	SPIE Optical Engineering + Applications 2012
Country/Territory	United States
City	San Diego
Period	12/08/12 → 16/08/12

Keywords

@conference{6dad78c5f1a04e5d94cb6036f4693e61,

title = "Photoluminescence-based detection of particle contamination on EUV reticle",

keywords = "IR-83226, METIS-292768",

author = "An Gao and P.J. Rizo and L. Scaccabarozzi and C.J. Lee and V. Banine and F. Bijkerk",

year = "2012",

month = aug,

day = "12",

language = "English",

note = "SPIE Optical Engineering + Applications 2012 ; Conference date: 12-08-2012 Through 16-08-2012",

}