Photoluminescence-based detection of particle contamination on extreme ultraviolet reticles

A. Gao, P.J. Rizo, L. Scaccabarozzi, C.J. Lee, V. Banine, F. Bijkerk

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Abstract

Here, we propose a comparison-free inspection technique to detect particle contamination on the reticle of extreme ultraviolet (EUV) lithography systems, based on the photoluminescence spectral characteristics of the contaminant particles and their elemental composition. We have analyzed the spectra from different particles found on reticles in EUV lithographic systems and have determined the minimum detectable particle size: 25 nm for organic particles and 100 nm for Al particles. Stainless steel coatings (50 nm thick and 50 × 50 μm2 in area) exhibit detectable photoluminescence, and the estimated minimum detectable particle is 2 μm.
Original languageEnglish
Article number063109
Number of pages8
JournalReview of scientific instruments
Volume86
Issue number6
DOIs
Publication statusPublished - 2015

Keywords

  • METIS-310769
  • IR-96156

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