Photon imaging using post-processed CMOS chips

This thesis presents our work on an integrated photon detector made by post-processing of CMOS sensor arrays. The aim of the post-processing is to combine all elements of the detector into a single monolithic device. These elements include a photocathode to convert photon radiation into electronic signals (in the extreme case this conversion is from a single photon into a single electron), an electron multiplication structure to increase the magnitude of the signal pulse and a position sensitive recording element to register the place, time and size of the electron charge pulse. The recording element is part of a CMOS imaging IC. The rest of the detector structure is processed directly onto the CMOS substrate. This method is called postprocessing.